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Optical MEMS switch control and packaging
Proceedings of the 5th Electronics Packaging Technology Conference (EPTC 2003), 2004A MEMS switch which is packaged with electronic control modules has been developed and is presented in this paper. The switch consists of a comb-drive actuator and a micro-mirror which is interposed between two input/output fibers. All these are combined with the electronic control system.
H. Cai +6 more
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Dynamic Simulation of Optical MEM Switches
Optics in Computing, 2001We have extended our CAD tool Chatoyant to support system-level optical MEM modeling. In this paper, we briefly describe our modeling techniques and we present dynamic simulations of a 2×2 optical MEM switch.
Timothy P. Kurzweg +4 more
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Mems optical switches with guaranteed switching status
The Journal of the Acoustical Society of America, 2006Techniques for controlling and monitoring MEMS optical switches are disclosed. In one embodiment, an electronic feedback loop is employed to determine a control signal to a MEMS switch actuator in accordance with an instruction. The control signal is so determined in such a way that the switching statuses are maximally guaranteed.
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MEMS optical tunneling structure for thermo-optic switching
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008This paper presents a thermooptic switch based on the optical tunneling effect of a double optical barriers system. By introducing a new physical mechanism of the optical tunneling effect into micro-electro-mechanical systems (MEMS) technology, a switching contrast of more than 30 dB with a response time of less than 3 mus are obtained.
W.M. Zhu, X.M. Zhang, T. Zhong, A.Q. Liu
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Deformation measurement of RF MEMS switches by optical interference
Microelectronics Reliability, 2004Abstract The RF switches were fabricated based on microelectromechanical techniques. For good RF performances, the precise control is needed over the contact separation when switch is open and over the contact force when the switch is closed. In this paper, the optical interference technique has been applied to make the accurate measurement of the ...
Yu Ying, Peter Grant
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MEMS Mirrors for Optical Switching Applications
2014MEMS based optical switches are being developed for application in communication networks. Although, very useful, most of them have relatively simple functionality. Many of these systems are now at a commercialization stage. Silicon based optical switches with electrostatic actuating are proving to be very attractive due to their application in fiber ...
Aklesh Kumar Meena +3 more
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Optical switching technology comparison: optical mems vs. other technologies
IEEE Communications Magazine, 2003Optical switching technologies are very crucial to future mobile broadband all-optical IP networks. Many different optical switching technologies are currently available or under development. The main purpose of the article is to conduct performance comparisons on optical switching technologies in terms of basic performance, network requirements, and ...
Ma X.H.;郭更生 +2 more
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Packaging of a fiber optical MEMS switch
4th Electronics Packaging Technology Conference, 2002., 2003In this paper, packaging of a Microelectromechanical System (MEMS)-based fiber optical switch was implemented along with the investigation on the related packaging techniques. A subpackage was formed as the first level encapsulation to house the MEMS chip.
Z.F. Wang +5 more
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A 3-D MEMS optical switch for OXCs
Frontiers in Optics, 2003A large-scale, compact optical switch based on MEMS-tilt mirror arrays and free-space optics is described. The mirror fabricated by the SOI-bulk micromachining technology provides reliable switching, and the optics consists of low-cost, high-accurate polymer components.
T. Yamamoto +6 more
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Analysis of Radius of Curvature of MEMS Optical Switch
Journal of Optical Communications, 2006Micro electro mechanical systems (MEMS) curved micromirror switch has the advantage of smaller size and lower cost. The radius of curvature of the micromirror is thus very important parameter. The effect of material properties and temperature on the curvature is analyzed in detail.
Rashmi Bahuguna +3 more
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