Results 121 to 130 of about 334,732 (168)

A Seismic-Grade Resonant MEMS Accelerometer

Journal of Microelectromechanical Systems, 2014
We report on the characterization of a high-resolution micromachined resonant accelerometer fabricated in an SoI-microelectromechanical (MEMS) foundry process. A prototype device demonstrated scale factor of 142.8 Hz/m/s 2 , dynamic range of >140 dB, and noise-limited resolution that is comparable with existing high-resolution macroscale seismometers.
Xudong Zou, Ashwin Seshia
exaly   +3 more sources

A high-resolution resonant MEMS accelerometer

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015
This paper reports on a vacuum packaged resonant MEMS accelerometer that demonstrates some of the highest sensitivities reported to-date and a ∼7x scale factor enhancement relative to a recently reported prototype, benefiting from a larger proof mass and improved leverage amplification factor.
Xudong Zou, Ashwin Seshia
exaly   +3 more sources

A MEMS resonant accelerometer for low-frequency vibration detection

Sensors and Actuators A: Physical, 2018
Abstract According to their inherent characteristics, MEMS resonant accelerometers are suitable for low-frequency, low-g acceleration measurement. In this paper, we report a MEMS accelerometer based on double-ended-tuning fork resonators. The scale factor of our sensor is 1153.3 Hz/g and the bias stability of the oscillator is 58 ppb (parts per ...
Yajing Shen, Shudong Wang, Hanyue Liu
exaly   +4 more sources

An Ultra-High Resolution Resonant MEMS Accelerometer

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019
This paper reports initial results on the implementation of a high-resolution resonant MEMS accelerometer with a noise floor of $17.8\text{ng}/\surd{}\text{Hz}$ and a bias stability of 17.5ng with a differential frequency readout configuration. The differential readout scheme provides for rejection of common mode environmental effects to first order.
Milind Pandit, Arif Mustafazade, Chun Zhao, Guillermo Sobreviela, Xudong Zou, Philipp Steinmann, Ashwin Seshia   +6 more
openaire   +2 more sources

A Resonant MEMS Accelerometer Utilizing AC Polarization

2018 IEEE International Frequency Control Symposium (IFCS), 2018
In this paper, we present a resonant MEMS accelerometer (RXL) using AC polarization voltage as an alternative to the existing DC polarization schemes. By making full use of the intrinsic frequency mixing property of a parallel plate capacitive transducer, we are able to down-convert the oscillation frequency to 10kHz, an order of magnitude lower than ...
Chun Zhao, Guillermo Sobreviela, Milind Pandit, Arif Mustafazade, Sijun Du, Xudong Zou, Ashwin Seshia   +6 more
openaire   +2 more sources

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Design and Analysis of MEMS Biaxial Coupled Resonance Accelerometer

2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2021
In this paper, a new type of biaxial coupled resonant accelerometer is designed, which mainly includes proof mass, four double-ended tuning forks, micro-lever, excitation comb and detection comb. The biaxial coupled resonant accelerometer can measure acceleration along the X and Y axes with coupled structure.
Huimin Zhang, Yating Zhang, Wei Zhang
openaire   +2 more sources

Systematic Modeling of a MEMS Resonant Accelerometer Based on Displacement Coordination

IEEE Sensors Journal, 2022
Yang Zhao, Jinyang Huang, Anping Qiu
exaly   +2 more sources

Resonant MEMS Accelerometer With CW Laser Excitation

Journal of Microelectromechanical Systems, 2020
A silicon MEMS resonator which forms an optical cavity with its package is self-excited and interrogated with a CW laser beam at telecom wavelengths delivered to the device through optical fiber. Self-oscillation at 68 kHz occurs with a buckled resonator for laser powers >7 mW.
William A. Challener, Ansas M. Kasten, Mengli Wang, David Lin, Sergei Zotov, Russell Craddock, Marco Aimi   +6 more
openaire   +1 more source

A measuring circuit for MEMS resonant accelerometer

Proceedings of IEEE Sensors, 2004., 2006
The MEMS accelerometer has characteristics of high precision, small volume, low cost and is easy to be integrated. It has received attention from many people. Focused on the measurement of MEMS resonant accelerometer signals, the article introduces a new method of measuring weak signals, and designs a relative difference frequency measurement circuit ...
null Pei Xu, null Jun Liu, null Wendong Zhang   +2 more
openaire   +1 more source