Results 131 to 140 of about 334,732 (168)
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A novel design of a MEMS resonant accelerometer with adjustable sensitivity
Sensors and Actuators A: PhysicalXueyong Wei, Yonghong Qi
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Dual mode resonant capacitive MEMS accelerometer
2016 IEEE International Symposium on Inertial Sensors and Systems, 2016This paper reports the design, fabrication and characterization of a dual mode resonant capacitive MEMS accelerometer. The sensor consists of electrically coupled micro resonators and a proof mass. The applied acceleration causes displacement of the proof mass which changes the electrostatic gap between the proof mass and the sensing electrodes.
Fatemeh Edalatfar +3 more
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Self‐oscillation loop design and measurement for an MEMS resonant accelerometer
International Journal of Adaptive Control and Signal Processing, 2012SUMMARYThis paper provides detailed information about the dynamic model and closed‐loop control theory of resonant accelerometer based on electrostatic stiffness. After the resonant accelerometer principle based on electrostatic stiffness has been analyzed, a dynamic model was built.
Heng, Liu, Li, Meng Rui
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Response characteristics of a MEMS resonant accelerometer to external acoustic excitation
2016 IEEE SENSORS, 2016In this paper, we present resent works on acoustic response of a MEMS resonant accelerometer. We analyzed why the resonant accelerometer reacted to external acoustic noise theoretically and showed how to reduce the acoustic response characteristics experimentally. The resonant accelerometer consists of a proof mass and a dual ended tuning fork.
ByungSu Park +4 more
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Simulation Analysis on Thermal Drift of MEMS Resonant Accelerometer
2019 20th International Conference on Electronic Packaging Technology(ICEPT), 2019A dual mass and dual double-ended tuning forks (DETF) silicon resonant accelerometer is presented. The low-stress GOS substrate based full-silicon wafer-level fabrication technology and an improved DETF structure are proposed. The position and the size of the anchor have been optimized.
Nannan Li +3 more
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Resolution and start-up dynamics of MEMS resonant accelerometers
2011 IEEE SENSORS Proceedings, 2011In this paper it is presented a study on two key parameters of MEMS resonant accelerometers, resolution and start-up dynamics. A uniaxial differential accelerometer, built in the surface micromachining ThELMA process of ST Microelectronics, is used in the tests together with a discrete components readout circuit.
TOCCHIO, ALESSANDRO +4 more
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A MEMS resonant accelerometer with sensitivity enhancement and adjustment mechanisms
Journal of Micromechanics and Microengineering, 2017Abstract This paper proposes a resonant accelerometer with sensitivity enhancement and adjustment mechanisms based on microelectromechanical systems (MEMS). Different from conventional resonant accelerometers with sensitivity only enhanced by microleverage mechanisms, the proposed accelerometer utilizes a fishbone-
Hong Ding +3 more
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A single-mass self-resonating closed-loop capacitive MEMS accelerometer
2016 IEEE SENSORS, 2016This paper presents a single-axis, self-resonating accelerometer. The presented accelerometer incorporates a resonating sensing element which is used along with a closed-loop self-resonance circuit, and the analog force-feedback readout circuit. During operation, the sensing element is oscillated at its fundamental frequency through dedicated actuation
Talha Kose +3 more
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In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2020In this work, we present a high-performance MEMS resonant accelerometer. The finite element method (FEM) results showed that the sensor can measure the magnitude and direction of in-plane acceleration at the same time. Meanwhile, the novel structure can theoretically eliminate the influence of temperature drift.
Shudong Wang +4 more
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Design and performance test of an oscillation loop for a MEMS resonant accelerometer
Journal of Micromechanics and Microengineering, 2003In this paper, the design, analysis and experimental results of the self-sustained oscillation loop for a tunable surface micromachined resonant accelerometer, ACRC-RXL are presented. The fabrication process of the mechanical structure is also illustrated.
Sangkyung Sung +3 more
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