Results 131 to 140 of about 865 (177)

A 2D omnidirectional inertial switch with multiple thresholds. [PDF]

Sci Rep
Algoos Y, Alahmdi R, Niyazi A, Xu Q, Feron E, Younis MI.   +5 more
europepmc   +1 more source

A Seismic-Grade Resonant MEMS Accelerometer

Journal of Microelectromechanical Systems, 2014
We report on the characterization of a high-resolution micromachined resonant accelerometer fabricated in an SoI-microelectromechanical (MEMS) foundry process. A prototype device demonstrated scale factor of 142.8 Hz/m/s 2 , dynamic range of >140 dB, and noise-limited resolution that is comparable with existing high-resolution macroscale seismometers.
Xudong Zou, Ashwin A Seshia
exaly   +3 more sources

A MEMS resonant accelerometer for low-frequency vibration detection

Sensors and Actuators A: Physical, 2018
Abstract According to their inherent characteristics, MEMS resonant accelerometers are suitable for low-frequency, low-g acceleration measurement. In this paper, we report a MEMS accelerometer based on double-ended-tuning fork resonators. The scale factor of our sensor is 1153.3 Hz/g and the bias stability of the oscillator is 58 ppb (parts per ...
Shudong Wang, Xueyong Wei, Yulong Zhao   +2 more
exaly   +4 more sources

An Ultra-High Resolution Resonant MEMS Accelerometer

2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), 2019
This paper reports initial results on the implementation of a high-resolution resonant MEMS accelerometer with a noise floor of $17.8\text{ng}/\surd{}\text{Hz}$ and a bias stability of 17.5ng with a differential frequency readout configuration. The differential readout scheme provides for rejection of common mode environmental effects to first order.
Milind Paṇḍit, Arif Mustafazade, Chun Zhao   +2 more
exaly   +3 more sources

Temperature compensation for MEMS resonant accelerometer based on genetic algorithm optimized backpropagation neural network

Sensors and Actuators A: Physical, 2020
Temperature compensation with high accuracy is crucial for improving the performance of MEMS resonant accelerometers. In this paper, we propose an effective temperature compensation method based on the backpropagation neural network (BP-NN).
Shudong Wang, Yajing Shen, Hairong Gu
exaly   +2 more sources

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Design and Analysis of MEMS Biaxial Coupled Resonance Accelerometer

2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2021
In this paper, a new type of biaxial coupled resonant accelerometer is designed, which mainly includes proof mass, four double-ended tuning forks, micro-lever, excitation comb and detection comb. The biaxial coupled resonant accelerometer can measure acceleration along the X and Y axes with coupled structure.
Huimin Zhang, Yating Zhang, Wei Zhang
openaire   +1 more source

Resonant MEMS Accelerometer With CW Laser Excitation

Journal of Microelectromechanical Systems, 2020
A silicon MEMS resonator which forms an optical cavity with its package is self-excited and interrogated with a CW laser beam at telecom wavelengths delivered to the device through optical fiber. Self-oscillation at 68 kHz occurs with a buckled resonator for laser powers >7 mW.
William A. Challener, Ansas M. Kasten, Mengli Wang, David Lin, Sergei Zotov, Russell Craddock, Marco Aimi   +6 more
openaire   +1 more source

A measuring circuit for MEMS resonant accelerometer

Proceedings of IEEE Sensors, 2004., 2006
The MEMS accelerometer has characteristics of high precision, small volume, low cost and is easy to be integrated. It has received attention from many people. Focused on the measurement of MEMS resonant accelerometer signals, the article introduces a new method of measuring weak signals, and designs a relative difference frequency measurement circuit ...
null Pei Xu, null Jun Liu, null Wendong Zhang   +2 more
openaire   +1 more source

High Quality Factor Resonant MEMS Accelerometer With Continuous Thermal Compensation

IEEE Sensors Journal, 2015
We report a new silicon Microelectromechanical systems (MEMS) accelerometer based on differential frequency modulation (FM) with experimentally demonstrated thermal compensation over a dynamic temperature environment and \mu g -level Allan deviation of ...
Sergei A Zotov, Alexander A Trusov, Andrei M Shkel   +2 more
exaly   +2 more sources

Systematic Modeling of a MEMS Resonant Accelerometer Based on Displacement Coordination

IEEE Sensors Journal, 2022
Jinyang Huang, Yang Zhao, Qin Shi
exaly   +2 more sources