Results 161 to 168 of about 334,732 (168)

Development of a High Accuracy MEMS Differential Resonant Accelerometer

The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
Kei MASUNISHI, Etsuji OGAWA, Naoki HIRAMATSU, Daiki ONO, Kengo UCHIDA, Fumito MIYAZAKI, Fumitaka ISHIBASHI, Hideaki MURASE, Jumpei OGAWA, Yasushi TOMIZAWA   +9 more
openaire   +1 more source

A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Chen Wang, Aojie Quan, Linlin Wang, Rui Amendoeira Esteves, Yuan Wang, Bernardo P. Madeira, Yangyang Guan, Xinyu Wu, Nadezda Kuznetsova, Milad Shojaeian, Pan Zhang, Pui-In Mak, Michael Kraft   +12 more
openaire   +1 more source

Design and analysis of high resonant frequency (1 MHz) MEMS accelerometer

2013
Prashant Singh
exaly  

A Bent-TBTF Resonant MEMS Accelerometer Using Auxiliary Supporting Beams

IEEE Electron Device Letters
Xiao-Sheng Zhang, Cheng Tu, Zenghui Wang   +2 more
exaly  

Large mass MEMS resonant beam accelerometer

SHAFFER RYAN AUSTIN, HOMEIJER BRIAN D, RESNICK PAUL J   +2 more
openaire   +1 more source

MEMS resonant accelerometer having improved electrical characteristics

2013
SIMONI BARBARA, COMI CLAUDIA, CORIGLIANO ALBERTO   +2 more
openaire   +2 more sources

A Closed-Loop MEMS Resonant Accelerometer with Force Rebalance Control

2025 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
Bowen Wang, Zhenxiang Qi, Bingchen Zhu, Zhaoyang Zhai, Wuhao Yang, Xudong Zou   +5 more
openaire   +1 more source

High-performance navigation grade resonant beam MEMS accelerometers

2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
Lokesh Gurung, Theo Miani, Guillermo Sobreviela-Falces, Douglas Young, Colin Baker, Ashwin Seshia   +5 more
openaire   +1 more source