Results 161 to 170 of about 865 (177)

A Review on MEMS Silicon Resonant Accelerometers

Journal of Microelectromechanical Systems
Zhao Zhang, Hemin Zhang, Yongcun Hao, Honglong Chang   +3 more
openaire   +1 more source

Analysis of Temperature Stability and Change of Resonant Frequency of a Capacitive MEMS Accelerometer

International Journal of Precision Engineering and Manufacturing, 2022
Sung-Hoon Choa, Choa Sung-Hoon
exaly  

Vibration Performance Analysis and Improvement of MEMS Resonant Accelerometers

IEEE Transactions on Industrial Electronics
Yukun Ma, Haonan Li, Yunfeng Liu, Rong Zhang 0005, Fengtian Han   +4 more
openaire   +1 more source

A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation

Journal of Microelectromechanical Systems, 2021
Hong Ding, Jin Xie, Jin Xie
exaly  

A Tri-axial Resonating Beam MEMS Accelerometer

Journal of Electrical Engineering & Technology
Chinmay Yadav, S Srinivasulu Raju, Sujan Yenuganti   +2 more
openaire   +1 more source

Behavioral Simulation of a Non-resonant MEMS Gyro-accelerometer

International Journal of Computer & Organization Trends, 2014
Payal Verma, R. Gopal, Sandeep K. Arya
openaire   +1 more source

A Resonant MEMS Accelerometer With 56ng Bias Stability and 98ng/Hz1/2 Noise Floor

Journal of Microelectromechanical Systems, 2019
Chun Zhao, Milind Paṇḍit, Guillermo Sobreviela   +2 more
exaly  

A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer

Journal of Microelectromechanical Systems, 2019
Jian Yang, Meng Zhang, Chaowei Si
exaly  

Optimal design of the stress-buffering structure in MEMS resonant accelerometer package

2023
Zou Xudong
exaly  

A MEMS piezoelectric in-plane resonant accelerometer based on aluminum nitride with two-stage microleverage mechanism

Sensors and Actuators A: Physical, 2017
Hong Ding, Xianhao Le, Jin Xie
exaly