Results 151 to 160 of about 865 (177)

Oscillation Loop for a Resonant Type MEMS Accelerometer and Its Performance

2006 IEEE/ION Position, Location, And Navigation Symposium, 2006
This paper presents an oscillation loop for an INS (Inertial Navigation System) grade, surface micro- machined differential resonant accelerometer. This resonant type sensor utilizes the electrostatic stiffness changing effect of an electrostatic actuator. This device produces a differential digital output upon an applied acceleration.
null Chul Hyun, null Jang Gyu Lee, null Taesam Kang   +2 more
openaire   +1 more source

An inertial-grade laterally-driven MEMS differential resonant accelerometer

Proceedings of IEEE Sensors, 2004., 2006
Inertial-grade laterally-driven differential resonant accelerometer (DRXL), using a gap sensitive electrostatic stiffness change effect, is designed, fabricated and tested using a mixed micromachining process based on (111) single crystal silicon. The resonant accelerometer consists of a double ended tuning fork (DETF) and two proof masses in the same ...
null Seonho Seok, null Hak Kim, null Kukjin Chun   +2 more
openaire   +1 more source

Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers

Journal of Microelectromechanical Systems, 2009
This paper describes the development of aluminum nitride (AlN) resonant accelerometers that can be integrated directly over foundry CMOS circuitry. Acceleration is measured by a change in resonant frequency of AlN double-ended tuning-fork (DETF) resonators.
Roy H. Olsson, Kenneth E. Wojciechowski, Michael S. Baker, Melanie R. Tuck, James G. Fleming   +4 more
openaire   +1 more source

High resolution resonant accelerometer based on MEMS technology

2018
This thesis is not available on this repository until the author agrees to make it public. If you are the author of this thesis and would like to make your work openly available, please contact us: thesis@repository.cam.ac.uk.
openaire   +1 more source

Design and Experiment of Push–Pull MEMS Resonant Accelerometers

IEEE Sensors Journal, 2023
Yunbo Shi, Jieyu Zhang, Fei Li, Yiwei Chen, Yuntian Qu, Huiliang Cao   +5 more
openaire   +1 more source

Novel Resonant Accelerometer with Micro Leverage Fabricated by MEMS Technology

Chinese Journal of Mechanical Engineering, 2011
For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-resolution inertial-grade novel micro resonant accelerometer is studied.Based on the detecting theory of the resonant sensors,the ...
openaire   +1 more source

Design and Test of MEMS Resonant Accelerometer with a Novel Die-Attach Structure

2023 IEEE SENSORS, 2023
Yukun Ma, Shaohang Wang, Wenyi Xu, Rong Zhang 0005, Fengtian Han   +4 more
openaire   +1 more source

Estimation of Amplitude-Dependent Resonance and Damping in MEMS Shock Accelerometers

Understanding the dynamic response of accelerometers is critical to interpreting data obtained in impulsive loading conditions. While this information is commonly provided by manufacturers, the estimated properties are typically obtained at levels below the full range of the sensor. Using high bandwidth operating data of varying amplitudes, the damping
Jason R. Foley, Thomas J. Lagoski, Jontia Brown, Jonathan Hong   +3 more
openaire   +1 more source

Accurate Identification of the Evolution of MEMS Resonant Accelerometer Residual Stresses at the Wafer-Die-Chip Level

Journal of Microelectromechanical Systems, 2022
Jinyang Huang, Yang Zhao, Guoming Xia
exaly  

A Resonant Accelerometer Based on Piezoelectric TBTF MEMS Resonator and Two-stage Microleverage

2023 6th International Conference on Electronics Technology (ICET), 2023
Lei Li, Cheng Tu, Xiao-Sheng Zhang
openaire   +1 more source