Results 171 to 177 of about 865 (177)

Mechanical and Electronic Amplitude-Limiting Techniques in a MEMS Resonant Accelerometer

IEEE Sensors Journal, 2012
Alessandro Tocchio, Giacomo Langfelder
exaly  

Duplex mode tilt measurements based on a MEMS biaxial resonant accelerometer

Sensors and Actuators A: Physical, 2019
Hong Ding, Bing-Feng Ju, Jin Xie
exaly  

Development of a High Accuracy MEMS Differential Resonant Accelerometer

The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
Kei MASUNISHI, Etsuji OGAWA, Naoki HIRAMATSU, Daiki ONO, Kengo UCHIDA, Fumito MIYAZAKI, Fumitaka ISHIBASHI, Hideaki MURASE, Jumpei OGAWA, Yasushi TOMIZAWA   +9 more
openaire   +1 more source

A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators

2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Chen Wang, Aojie Quan, Linlin Wang, Rui Amendoeira Esteves, Yuan Wang, Bernardo P. Madeira, Yangyang Guan, Xinyu Wu, Nadezda Kuznetsova, Milad Shojaeian, Pan Zhang, Pui-In Mak, Michael Kraft   +12 more
openaire   +1 more source

A Closed-Loop MEMS Resonant Accelerometer with Force Rebalance Control

2025 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
Bowen Wang, Zhenxiang Qi, Bingchen Zhu, Zhaoyang Zhai, Wuhao Yang, Xudong Zou   +5 more
openaire   +1 more source

A Bent-TBTF Resonant MEMS Accelerometer Using Auxiliary Supporting Beams

IEEE Electron Device Letters
Cheng Tu, Xiao-Sheng Zhang, Zenghui Wang   +2 more
exaly  

High-performance navigation grade resonant beam MEMS accelerometers

2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
Lokesh Gurung, Theo Miani, Guillermo Sobreviela-Falces, Douglas Young, Colin Baker, Ashwin Seshia   +5 more
openaire   +1 more source