Results 141 to 150 of about 334,732 (168)
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An inertial-grade laterally-driven MEMS differential resonant accelerometer
Proceedings of IEEE Sensors, 2004., 2006Inertial-grade laterally-driven differential resonant accelerometer (DRXL), using a gap sensitive electrostatic stiffness change effect, is designed, fabricated and tested using a mixed micromachining process based on (111) single crystal silicon. The resonant accelerometer consists of a double ended tuning fork (DETF) and two proof masses in the same ...
null Seonho Seok +2 more
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Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers
Journal of Microelectromechanical Systems, 2009This paper describes the development of aluminum nitride (AlN) resonant accelerometers that can be integrated directly over foundry CMOS circuitry. Acceleration is measured by a change in resonant frequency of AlN double-ended tuning-fork (DETF) resonators.
Roy H. Olsson +4 more
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Oscillation Loop for a Resonant Type MEMS Accelerometer and Its Performance
2006 IEEE/ION Position, Location, And Navigation Symposium, 2006This paper presents an oscillation loop for an INS (Inertial Navigation System) grade, surface micro- machined differential resonant accelerometer. This resonant type sensor utilizes the electrostatic stiffness changing effect of an electrostatic actuator. This device produces a differential digital output upon an applied acceleration.
null Chul Hyun +2 more
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High resolution resonant accelerometer based on MEMS technology
2014This thesis is not available on this repository until the author agrees to make it public. If you are the author of this thesis and would like to make your work openly available, please contact us: thesis@repository.cam.ac.uk.
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Estimation of Amplitude-Dependent Resonance and Damping in MEMS Shock Accelerometers
2015Understanding the dynamic response of accelerometers is critical to interpreting data obtained in impulsive loading conditions. While this information is commonly provided by manufacturers, the estimated properties are typically obtained at levels below the full range of the sensor. Using high bandwidth operating data of varying amplitudes, the damping
Jason R. Foley +3 more
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Design and Experiment of Push–Pull MEMS Resonant Accelerometers
IEEE Sensors Journal, 2023Yunbo Shi +5 more
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A Resonant Accelerometer Based on Piezoelectric TBTF MEMS Resonator and Two-stage Microleverage
2023 6th International Conference on Electronics Technology (ICET), 2023Lei Li, Cheng Tu, Xiao-Sheng Zhang
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Design and Test of MEMS Resonant Accelerometer with a Novel Die-Attach Structure
2023 IEEE SENSORS, 2023Yukun Ma +4 more
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Vibration Performance Analysis and Improvement of MEMS Resonant Accelerometers
IEEE Transactions on Industrial ElectronicsYukun Ma +4 more
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