Results 141 to 150 of about 865 (177)

Dual mode resonant capacitive MEMS accelerometer

2016 IEEE International Symposium on Inertial Sensors and Systems, 2016
This paper reports the design, fabrication and characterization of a dual mode resonant capacitive MEMS accelerometer. The sensor consists of electrically coupled micro resonators and a proof mass. The applied acceleration causes displacement of the proof mass which changes the electrostatic gap between the proof mass and the sensing electrodes.
Fatemeh Edalatfar, Sadegh Hajhashemi, Bahareh Yaghootkar, Behraad Bahreyni   +3 more
openaire   +1 more source

Response characteristics of a MEMS resonant accelerometer to external acoustic excitation

2016 IEEE SENSORS, 2016
In this paper, we present resent works on acoustic response of a MEMS resonant accelerometer. We analyzed why the resonant accelerometer reacted to external acoustic noise theoretically and showed how to reduce the acoustic response characteristics experimentally. The resonant accelerometer consists of a proof mass and a dual ended tuning fork.
ByungSu Park, Sang-Woo Lee, Kyungjun Han, Myeong-Jong Yu, Byungsu Chang   +4 more
openaire   +1 more source

Self‐oscillation loop design and measurement for an MEMS resonant accelerometer

International Journal of Adaptive Control and Signal Processing, 2012
SUMMARYThis paper provides detailed information about the dynamic model and closed‐loop control theory of resonant accelerometer based on electrostatic stiffness. After the resonant accelerometer principle based on electrostatic stiffness has been analyzed, a dynamic model was built.
Heng, Liu, Li, Meng Rui
openaire   +2 more sources

A novel design of a MEMS resonant accelerometer with adjustable sensitivity

Sensors and Actuators A: Physical
Yonghong Qi, Minghui Zhao, Xueyong Wei   +2 more
exaly   +2 more sources

Resolution and start-up dynamics of MEMS resonant accelerometers

2011 IEEE SENSORS Proceedings, 2011
In this paper it is presented a study on two key parameters of MEMS resonant accelerometers, resolution and start-up dynamics. A uniaxial differential accelerometer, built in the surface micromachining ThELMA process of ST Microelectronics, is used in the tests together with a discrete components readout circuit.
TOCCHIO, ALESSANDRO, CASPANI, ALESSANDRO, LANGFELDER, GIACOMO, LONGONI, ANTONIO FRANCESCO, E. Lasalandra   +4 more
openaire   +2 more sources

Simulation Analysis on Thermal Drift of MEMS Resonant Accelerometer

2019 20th International Conference on Electronic Packaging Technology(ICEPT), 2019
A dual mass and dual double-ended tuning forks (DETF) silicon resonant accelerometer is presented. The low-stress GOS substrate based full-silicon wafer-level fabrication technology and an improved DETF structure are proposed. The position and the size of the anchor have been optimized.
Nannan Li, Chaoyang Xing, Peng Sun, Zhengqiang Zhu   +3 more
openaire   +1 more source

A MEMS resonant accelerometer with sensitivity enhancement and adjustment mechanisms

Journal of Micromechanics and Microengineering, 2017
This paper proposes a resonant accelerometer with sensitivity enhancement and adjustment mechanisms based on microelectromechanical systems (MEMS). Different from conventional resonant accelerometers with sensitivity only enhanced by microleverage mechanisms, the proposed accelerometer utilizes a fishbone-shaped resonator as sensing element to enhance ...
Hong Ding, Wen Wang, Bing-Feng Ju, Jin Xie   +3 more
openaire   +1 more source

Sensitivity Enhancement of Mems Resonant Accelerometers by Using Electrostatic Spring

2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), 2020
Resonant accelerometers are very attractive for high-precision measurement applications due to their high sensitivity, frequency output, and large dynamic range. In order to further increase their sensitivity, we propose a novel method to enhance sensitivity of MEMS resonant accelerometer by using electrostatic spring softening effect.
Xingyin Xiong, Wang Zheng, Kunfeng Wang, Zhitian Li, Wuhao Yang, Xudong Zou   +5 more
openaire   +1 more source

A single-mass self-resonating closed-loop capacitive MEMS accelerometer

2016 IEEE SENSORS, 2016
This paper presents a single-axis, self-resonating accelerometer. The presented accelerometer incorporates a resonating sensing element which is used along with a closed-loop self-resonance circuit, and the analog force-feedback readout circuit. During operation, the sensing element is oscillated at its fundamental frequency through dedicated actuation
Talha Kose, Yunus Terzioglu, Kivanç Azgin, Tayfun Akin   +3 more
openaire   +1 more source

Design and performance test of an oscillation loop for a MEMS resonant accelerometer

Journal of Micromechanics and Microengineering, 2003
In this paper, the design, analysis and experimental results of the self-sustained oscillation loop for a tunable surface micromachined resonant accelerometer, ACRC-RXL are presented. The fabrication process of the mechanical structure is also illustrated.
Sangkyung Sung, Jang Gyu Lee, Byeungleul Lee, Taesam Kang   +3 more
openaire   +1 more source