Results 101 to 110 of about 2,028 (155)

SOI-Structured Piezoresistive Pressure Sensor with Integration of Temperature Sensor for Downhole Applications. [PDF]

Sensors (Basel)
Mireles J, Jiménez A, Sauceda Á.
europepmc   +1 more source

Dispersive coupling and dual-mode sensing of a micromechanical resonator. [PDF]

Microsyst Nanoeng
Xia W, Qin J, Lu Y, Chen D, Wang J, Xie B, Chen J.   +6 more
europepmc   +1 more source

Design and Fabrication of High-Frequency Resonant Micro-Accelerometer Based on Piezoelectric Stiffening Effect. [PDF]

Micromachines (Basel)
Todi A, Mansoorzare H, Abdolvand R.
europepmc   +1 more source

A multi-functional MEMS resonator for simultaneously dual-mode physical sensing and ppb-level timing. [PDF]

Microsyst Nanoeng
Xu J, Xi J, Wang C, Kraft M, Liu H, Martins RP, Mak PI, Wang Y.   +7 more
europepmc   +1 more source

An Enhanced Q-Factor Cantilever Resonator in Viscous Liquids Using Strategic Perforation. [PDF]

Micromachines (Basel)
Qu S, Xia C.
europepmc   +1 more source

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Automated design of a MEMS resonator

2007 IEEE Congress on Evolutionary Computation, 2007
As the application and complexity of microelectromechanical (MEMS) devices increases, there is a corresponding need for automated design and optimization tools to augment engineers' design skills. Evolutionary computation provides a set of tools that may prove very effective in this application domain.
Jason D. Lohn, William F. Kraus, Gregory S. Hornby   +2 more
openaire   +1 more source

MEMS Resonators: Numerical Modeling

2020
The thermal stability of the natural frequency of a double-ended tuning-fork MicroElectroMechanical Systems (MEMS) resonator is studied for different orientations of the structure on the silicon wafer and for several doping levels of the single-crystal silicon.
Zega V., Frangi A., Opreni A., Gattere G.   +3 more
openaire   +2 more sources

On the testing of MEMS resonators

2009 4th International Design and Test Workshop (IDT), 2009
This paper discusses the issues related to testing MEMS resonators, and suggests ways to mitigate the associated difficulties. Vacuum test conditions and their effect on the quality factor of a resonator are discussed. A custom-built vacuum system is described to simplify testing, and to avoid packaging at early stages of device characterization ...
S. Mahdavi, F. Nabki, M. Sawan, M. N. El-Gamal   +3 more
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Frequency Estimation for Resonant MEMS Sensors

2020 IEEE International Symposium on Circuits and Systems (ISCAS), 2020
Resonant MEMS sensors have potential of providing highly precise measurements. The accurate processing of the output relies on precise frequency estimation techniques especially in the context of portable sensors for particulate matter. This paper investigates five commonly used single-tone frequency estimation techniques (3-point DFT interpolation ...
Ajay Kumar Singh, Laxmeesha Somappa, Malar Chellasivalingam, Ashwin A. Seshia, Maryam Shojaei Baghini   +4 more
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Serrated mems resonators

The Journal of the Acoustical Society of America, 2009
One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC ...
Paul Merritt Hagelin, David Raymond Pedersen   +1 more
openaire   +1 more source