Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring. [PDF]
Pfusterschmied G +9 more
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Nonlinear oscillations in MEMS resonators
Nonlinearities in MEMS silicon resonators are caused by different effects. Depending on the resonator layout, different nonlinearities may be dominant in the resonator response. A model for a clamped-clamped beam resonator is derived, which contains both a mechanical and an electrical part.
Mestrom, R.M.C. +4 more
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Qualitative Identification of the Static Pull-In and Fundamental Frequency of One-Electrode MEMS Resonators. [PDF]
Han J +6 more
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A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators. [PDF]
Iqbal F, Lee B.
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Heteroepitaxial 3C-SiC for MEMS Applications. [PDF]
Garofalo A +6 more
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Implementation of reservoir computing using coupled microelectromechanical drum resonators via sideband-pumped phonon-cavity dynamics. [PDF]
Farah T +8 more
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A curved-beam piezoelectric MEMS resonator featuring multiple temperature plateaus with enhanced stability. [PDF]
Lian Y +14 more
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Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical resonators. [PDF]
Xiao Y, Sun C, Liu S, Wu G.
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Terahertz MEMS actuators and applications. [PDF]
Wang Z +13 more
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Wide Acoustic Bandgap Solid Disk-Shaped Phononic Crystal Anchoring Boundaries for Enhancing Quality Factor in AlN-on-Si MEMS Resonators. [PDF]
Siddiqi MWU, Lee JE.
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