Micro- and nanoelectromechanical system (MEMS and NEMS) resonators can exhibit rich nonlinear dynamics as they are often operated at large amplitudes with high quality factors and possess a high mode density with a variety of nonlinear modal couplings ...
Daniel Schiwietz +4 more
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Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage. [PDF]
Chen Z +6 more
europepmc +1 more source
Deep learning-driven performance prediction and design of high-DoF MEMS resonators. [PDF]
Jia Z +13 more
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Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review. [PDF]
Koh D, Jung Y, Kim J.
europepmc +1 more source
Tunable energy transfer in coupled nonlinear MEMS resonators under parametric modulation for enhanced sensor performance. [PDF]
Wang G +5 more
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Modeling and Analysis of Vibration Coupling in Differential Common-Based MEMS Resonators. [PDF]
Zhang J +5 more
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Multi-DoF AlN-on-SOI BAW MEMS resonators with coated ZIF-8 for gas sensing application. [PDF]
Wang L +10 more
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Piezoelectric MEMS Resonators for Cigarette Particle Detection. [PDF]
Toledo J +5 more
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Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators. [PDF]
Perelló-Roig R +3 more
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Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation. [PDF]
Bao FH +5 more
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