Results 61 to 70 of about 2,028 (155)

A Micro-Hotplate-Based Oven-Controlled System Used to Improve the Frequency Stability of MEMS Resonators. [PDF]

Micromachines (Basel), 2023
Feng T, Yu D, Wu B, Wang H.
europepmc   +1 more source

Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators. [PDF]

Microsyst Nanoeng, 2023
Linden J, Melech N, Sakaev I, Fogel O, Krylov S, Nuttman D, Zalevsky Z, Sirota M.   +7 more
europepmc   +1 more source

Lateral Extensional Mode Piezoelectric ZnO-on-Nickel RF MEMS Resonators for Back-End-of-Line Integration. [PDF]

Micromachines (Basel), 2023
Zaman A, Alsolami A, Wei M, Rivera I, Baghelani M, Wang J.   +5 more
europepmc   +1 more source

Design and Characterization of a Planar Micro-Conveyor Device Based on Cooperative Legged Piezoelectric MEMS Resonators. [PDF]

Micromachines (Basel), 2022
Ruiz-Díez V, Ababneh A, Seidel H, Sánchez-Rojas JL.   +3 more
europepmc   +1 more source

Switchable Transducers in GaN MEMS Resonators: Performance Comparison and Analysis. [PDF]

Micromachines (Basel), 2021
Ahmed I, Weinstein D.
europepmc   +1 more source

A micro resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms

AIP Advances, 2016
This letter reports a micro-electro-mechanical systems (MEMS) resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms. The sensor comprises two symmetrically-distributed double-ended tuning fork (DETF)
Dongyang Chen, Jiuxuan Zhao, Zhonggui Xu, Jin Xie   +3 more
doaj   +1 more source

Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame. [PDF]

Micromachines (Basel), 2022
Workie TB, Wu Z, Tang P, Bao J, Hashimoto KY.   +4 more
europepmc   +1 more source

Real-Time Tracking of the Dynamic Viscosity of Bitumen with Piezoelectric MEMS Resonators

Proceedings
This work demonstrates lab-scale monitoring of the dynamic viscosity of bitumen with piezoelectric MEMS resonators over a period of 120 h at an elevated temperature of 100 °C in air.
Suresh Alasatri, Michael Schneider, Johannes Mirwald, Bernhard Hofko, Ulrich Schmid   +4 more
doaj   +1 more source

Highly Sensitive Temperature Sensor Based on Coupled-Beam AlN-on-Si MEMS Resonators Operating in Out-of-Plane Flexural Vibration Modes. [PDF]

Research (Wash D C), 2022
Tu C, Yang MH, Zhang ZQ, Lv XM, Li L, Zhang XS.   +5 more
europepmc   +1 more source

Enhancing Performance of Reservoir Computing System Based on Coupled MEMS Resonators. [PDF]

Sensors (Basel), 2021
Zheng T, Yang W, Sun J, Xiong X, Wang Z, Li Z, Zou X.   +6 more
europepmc   +1 more source