Results 41 to 50 of about 2,028 (155)

CMOS-MEMS Thermal-Piezoresistive Resonators and Oscillators for Sensors

Frontiers in Mechanical Engineering, 2022
Microelectromechanical systems (MEMS) are in widespread commercial use due to their compact size, high performance, and low cost. MEMS resonators have emerged as front runners for sensing (accelerometers, gyroscopes, and particulate matter) and frequency
Anurag Zope, Sheng-Shian Li, Sheng-Shian Li   +2 more
doaj   +1 more source

Evolving MEMS Resonator Designs for Fabrication [PDF]

, 2008
Because of their small size and high reliability, microelectromechanical (MEMS) devices have the potential to revolution many areas of engineering. As with conventionally-sized engineering design, there is likely to be a demand for the automated design of MEMS devices.
Gregory Hornby, William F. Kraus, Jason D. Lohn   +2 more
openaire   +1 more source

Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures

IEEE Journal of the Electron Devices Society, 2017
In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 μm 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically.
F. Y. Kuo, C. Y. Lin, P. C. Chuang, C. L. Chien, Y. L. Yeh, Stella K. A. Wen   +5 more
doaj   +1 more source

3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Measurement Science Review, 2021
This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology.
Hu Baofa, Li Zhiwei, Wan Yuanjie, Zhou Peng, Zhang Chunquan, San Haisheng   +5 more
doaj   +1 more source

Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors

Sensors, 2016
Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability.
Francesc Torres, Arantxa Uranga, Martí Riverola, Guillermo Sobreviela, Núria Barniol   +4 more
doaj   +1 more source

Characterizing coupled MEMS resonators with an electrical resonator

Journal of Physics: Conference Series, 2016
Rapid development in micro/nano fabrication has enabled the shrinking of MEMS devices and the ability to fabricate them in large arrays. However, process variations and device mismatch have also raised testability issues in the MEMS industry. MEMS resonators have been coupled to simplify the characterization of the fabrication process and device ...
Guowei Tao, Bhaskar Choubey
openaire   +1 more source

Resonant Adaptive MEMS Mirror

Actuators, 2022
A novel MEMS continuous deformable mirror (DM) is presented. The mirror can be integrated into optical systems to compensate for monochromatic and chromatic aberrations. It is comprised of a 1.6 mm circular plate supported by eight evenly spaced flexural springs.
Amr Kamel, Samed Kocer, Lyazzat Mukhangaliyeva, Resul Saritas, Ahmet Gulsaran, Alaa Elhady, Mohamed Basha, Parsin Hajireza, Mustafa Yavuz, Eihab Abdel-Rahman   +9 more
openaire   +2 more sources

Resonant Varifocal Mems Mirror

2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022
This paper presents a novel varifocal mirror made of a micro-electromechanical system (MEMS) continuous deformable mirror (DM). It uses resonant electrostatic actuation (REA) via single voltage waveform to vary the focus of a 1.6 mm circular DM. Unlike traditional DMs, REA eliminates the need for individually addressable electrodes and the use of ...
Samed Kocer, Lyazzat Mukhangaliyeva, Resul Saritas, Ahmet Gulsaran, Alaa Elhady, Kevan Bell, Amr Kamel, Mohamed Basha, Taylan Das, Muhammed Kayaharman, Parsin Hajireza, Mustafa Yavuz, Eihab Abdel-Rahman   +12 more
openaire   +1 more source

A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

Microsystems & Nanoengineering
The emergence of microhemispherical resonant gyroscopes, which integrate the advantages of exceptional stability and long lifetime with miniaturization, has afforded new possibilities for the development of whole-angle gyroscopes.
Baoyin Hou, Ye Zhu, Chaofan He, Weidong Wang, Zhi Ding, Wen He, Yong He, Lufeng Che   +7 more
doaj   +1 more source

Interface Material Modification to Enhance the Performance of a Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS Resonator by Localized Annealing Through Joule Heating

Micromachines
This paper presents a novel approach employing localized annealing through Joule heating to enhance the performance of Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS resonators that are crucial for applications in sensing, energy harvesting, frequency ...
Adnan Zaman, Ugur Guneroglu, Abdulrahman Alsolami, Liguan Li, Jing Wang   +4 more
doaj   +1 more source