Results 21 to 30 of about 2,028 (155)
IEEE Access, 2021 This paper presents a novel design for a high resolution microelectromechanical systems (MEMS) technology based resonant gyroscope using the mode-localization effect in weekly coupled resonators (WCRs) as a mechanism for sensing the input angular rate ...
Syed Ali Raza Bukhari +3 more
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Control of Spring Softening and Hardening in the Squared Daisy
Micromachines, 2021 Nonlinear, mechanical microelectromechanical system (MEMS) resonating structures exhibit large displacement and a relatively broad operating bandwidth.
Mathieu Gratuze +3 more
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Three-to-One Internal Resonance in MEMS Arch Resonators [PDF]
Sensors, 2019 We present an investigation of the nonlinear dynamics of a microelectromechanical system (MEMS) arch subjected to a combination of AC and DC loadings in the presence of three-to-one internal resonance. The axial force resulting from the residual stress or temperature variation is considered in the governing equation of motion.
Ze Wang, Jianting Ren
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Micromachines, 2021 MEMS resonators have become core devices in a large number of fields; however, due to their complex structures, the finite element analysis (FEA) method is still the main method for their theoretical analysis.
Qingsong Li +6 more
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Results in Physics, 2021 We present a design of MEMS-based tunable terahertz (THz) metamaterial (TTM) with polarization-dependent sensing characteristic. The MEMS-based TTM device is reconfiguration by using two electrostatic comb-drive actuators, which exhibits tunable dual ...
Yao Wen, Tao Xu, Yu-Sheng Lin
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Terahertz Detectors Using Microelectromechanical System Resonators
Sensors, 2023 The doubly clamped microelectromechanical system (MEMS) beam resonators exhibit extremely high sensitivity to tiny changes in the resonance frequency owing to their high quality (Q-) factors, even at room temperature.
Chao Li, Ya Zhang, Kazuhiko Hirakawa
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Internal resonance in a MEMS levitation force resonator
Nonlinear Dynamics, 2022 In this work, we explore internal resonances in a levitation force microelectromechanical system-based actuator assuming flexible cantilever and clamped–clamped microbeam configurations. The levitation force is generated through a special arrangement of two-side stationary charged substrates and a central grounded stationary strip.
Mohammadreza Zamanzadeh +2 more
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Design of U-Shaped Frequency Tunable Microwave Filters in MEMS Technology
Sensors, 2023 U-shaped microwave resonators implemented by RF MEMS switches can be considered the result of a novel design approach for obtaining small-footprint tunable resonators, owing to the bent shape of the resonator and the microsystem solution for changing the
Flavio Giacomozzi +8 more
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IEEE Access, 2021 Resonators based on micro and nanoelectromechanical systems (MEMS/NEMS) are used in many applications, including biological and gas sensors, magnetic field sensors, RF switches, accelerometers, piezoelectric micro and nanogenerators, and viscosity ...
Eustaquio Martinez-Cisneros +9 more
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AIP Advances, 2016 Phononic crystals (PnCs) and n-type doped silicon technique have been widely employed in silicon-based MEMS resonators to obtain high quality factor (Q) as well as temperature-induced frequency stability.
Thi Dep Ha, JingFu Bao
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