Results 1 to 10 of about 2,028 (155)
A Review on Coupled Bulk Acoustic Wave MEMS Resonators [PDF]
Sensors, 2022 With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention.
Linlin Wang, Chen Wang, Aojie Quan
exaly +4 more sources
The Recent Progress of MEMS/NEMS Resonators [PDF]
Micromachines, 2021 MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures.
Lei Wei, Fuhua Yang, Xiaodong Wang
exaly +5 more sources
A Tunable-Gain Transimpedance Amplifier for CMOS-MEMS Resonators Characterization [PDF]
Micromachines, 2021 CMOS-MEMS resonators have become a promising solution thanks to their miniaturization and on-chip integration capabilities. However, using a CMOS technology to fabricate microelectromechanical system (MEMS) devices limits the electromechanical ...
Rafel Perelló-Roig +3 more
doaj +2 more sources
Micromachines, 2021 This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators.
Muhammad Mubasher Saleem +2 more
exaly +3 more sources
Sensors, 2020 Over the last two decades, piezoelectric resonant sensors based on micro-electromechanical systems (MEMS) technologies have been extensively studied as such sensors offer several unique benefits, such as small form factor, high sensitivity, low noise ...
Cheng Tu +2 more
exaly +3 more sources
Miniaturized Multi-Cantilever MEMS Resonators with Low Motional Impedance [PDF]
MicromachinesMicroelectromechanical system (MEMS) cantilever resonators suffer from high motional impedance (Rm). This paper investigates the use of mechanically coupled multi-cantilever piezoelectric MEMS resonators in the resolution of this issue.
Haolin Li +8 more
doaj +2 more sources
Sensors, 2014 In this review paper, several strategies for the implementation of reconfigurable split ring resonators (SRRs) based on RF-MEMS switches are presented. Essentially three types of RF-MEMS combined with split rings are considered: (i) bridge-type RF-MEMS ...
FERRÁN Martin +2 more
exaly +3 more sources
Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators [PDF]
Sensors, 2018 MicroElectroMechanical Systems (MEMS) resonators are attracting increasing interest because of their smaller size and better integrability as opposed to their quartz counterparts.
Valentina Zega +3 more
doaj +2 more sources
Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing [PDF]
Sensors, 2020 Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing.
Rafel Perello-Roig +3 more
doaj +2 more sources
An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements [PDF]
Sensors, 2018 The importance of micro-electromechanical systems (MEMS) for radio-frequency (RF) applications is rapidly growing. In RF mobile-communication systems, MEMS-based circuits enable a compact implementation, low power consumption and high RF performance, e.g.
Johannes Stegner +5 more
doaj +2 more sources