Results 11 to 20 of about 2,028 (155)
An ultra-stable MEMS resonator with ±14 ppb frequency stability realized by nonlinearity-mediated drift suppression [PDF]
Microsystems & NanoengineeringSilicon-based MEMS resonators have shown promising potential to replace quartz crystal resonators in many fields, especially in realizing precise timing.
Yutao Xu +4 more
doaj +2 more sources
Sensors, 2016 Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sensors with potential applications such as biomedicine, automotive industry, navigation systems, space satellites, telecommunications and non-destructive ...
Agustin L Herrera-May +2 more
exaly +3 more sources
Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing [PDF]
Sensors, 2020 Hassan Imran +2 more
exaly +2 more sources
Concepts and Key Technologies of Microelectromechanical Systems Resonators
Micromachines, 2022 In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality ...
Tianren Feng +4 more
doaj +1 more source
Sensors, 2022 Anchor loss is usually the most significant energy loss factor in Micro-Electro-Mechanical Systems (MEMS) resonators, which seriously hinders the application of MEMS resonators in wireless communication.
Lixia Li +5 more
doaj +1 more source
Effect of defects on Q factors of single-crystal diamond MEMS resonators
Functional Diamond, 2023 A resonator with a high Q factor is generally pursued in the single-crystal diamond (SCD) microelectromechanical system (MEMS) for high-performance sensors.
Zilong Zhang +4 more
doaj +1 more source
A Reconfigurable Pseudohairpin Filter Based on MEMS Switches
Sensors, 2022 This work presents a bandpass-reconfigurable planar pseudohairpin filter based on RF-MEMS switches. Hairpin-line structures are preferred to design microstrip filters because this class of filters offers a more compact size, and, in general, hairpin ...
Massimo Donelli +3 more
doaj +1 more source
Electromagnetic silicon MEMS resonator [PDF]
Electrical Engineering in Japan, 2018 AbstractWe have fabricated a silicon MEMS resonator aiming at multimodal sensors, and evaluated vibration characteristics by electromagnetic drive and induced electromotive force detection. The resonance frequency of the driving voltage of 0.6 Vpp shows torsional vibration of approximately 87 kHz, and the resonance frequency is shifted toward the low ...
Yoshiyuki Watanabe +3 more
openaire +1 more source
Silicon on nothing MEMS electromechanical resonator [PDF]
Microsystem Technologies, 2007 Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
Durand, Cédric +9 more
openaire +4 more sources
2009 Spanish Conference on Electron Devices, 2009 This work shows the application of Pulsed Digital Oscillators to the detection of physical changes in MEMS devices that cause small shifts in their resonance frequencies. Such devices can be used as resonators in several sensor applications. According to this, a case study using a PDO structure to measure small concentrations of volatile organic gas ...
Ricart Campos, Jordi +3 more
openaire +2 more sources