Results 31 to 40 of about 2,028 (155)
Nature Communications, 2023 Implementing MEMS resonators calls for detailed microscopic understanding of the devices and imperfections from microfabrication. Lee et al. imaged super-high-frequency acoustic resonators with a spatial resolution of 100 nm and a displacement ...
Daehun Lee +4 more
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Journal of Electronic Science and Technology, 2021 This paper investigates the effects of material and dimension parameters on the frequency splitting, frequency drift, and quality factor (Q) of aluminium nitride (AlN)-on-n-doped/pure silicon (Si) microelectromechanical systems (MEMS) disk resonators ...
Thi Dep Ha
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Joint Effect of Heterogeneous Intrinsic Noise Sources on Instability of MEMS Resonators [PDF]
Electronics, 2015 This article's focus is on the numerical estimation of the overall instability of microelectromechanical-system-based (MEMS) resonators, caused by intrinsic noise mechanisms that are different in nature (electrical, mechanical or chemical). Heterogeneous
Olga Jakšić +6 more
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Charge Pump Phase-Locked Loop-Based Frequency Conditioning of a MEMS Resonator
Journal of Low Power Electronics and ApplicationsMEMS resonators have attracted attention for their wide applications in highly accurate clock references, sensors, wireless communications, frequency control, etc.
Xinyuan Hu, Yanfeng Jiang
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Multiple internal resonances in MEMS arch resonators [PDF]
Physics Letters A, 2018 Micromachined shallow arch resonant beams have attracted significant attention thanks to their rich dynamical behavior, inherent nonlinearities, and the potential to excite various internal resonances. Currently, there is a lack of comprehensive experimental studies for the various types of internal resonances in arches and particularly at the micro ...
A.Z. Hajjaj +4 more
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Characterization of a MEMS resonator with extended hysteresis
IEICE Electronics Express, 2011 In this paper an electrostatically driven MEMS resonator with resonance and hysteresis characteristics is reported. The resonator begins to exhibit spring-hardening effect at ac excitation voltage of 105mV and dc bias voltage of 5V in vacuum at 50Pa.
Suketu Naik, Takashi Hikihara
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Proceedings, 2017 This paper reports the design and characterization of partially-filled-gap capacitive MEMS resonators for distributed mass sensing applications. By filling the gap with HfO2, the coupling coefficient between electrode-resonator increases by ×6.67 times ...
Mariazel Maqueda Lopez +3 more
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Recent Advances in Flexible RF MEMS
Micromachines, 2022 Microelectromechanical systems (MEMS) that are based on flexible substrates are widely used in flexible, reconfigurable radio frequency (RF) systems, such as RF MEMS switches, phase shifters, reconfigurable antennas, phased array antennas and resonators,
Yingli Shi, Zhigang Shen
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Influence of a Tailored Oxide Interface on the Quality Factor of Microelectromechanical Resonators
Advanced Materials Interfaces, 2023 Piezoelectric microelectromechanical systems (MEMS) are used as sensors, actuators, energy harvesters, accelerometers, and communication modules. Aluminum nitride (AlN) is an especially attractive piezoelectric material because its fabrication process ...
David D. Lynes, Hengky Chandrahalim
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Frequency anti-crossing effect induced by hybrid modal coupling in a disk MEMS resonator [PDF]
AIP AdvancesWith the rapid development of micro- and nano-manufacturing technologies, microelectromechanical system (MEMS) resonators have become indispensable building blocks in high-precision sensing, time and frequency references, and quantum information systems.
Xingyuan Li, Wei Wang, Kai Wu
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