Results 51 to 60 of about 2,028 (155)
Electrical actuation of single-crystal diamond MEMS resonators at high temperatures
Functional DiamondAchieving efficient low-voltage actuation of microelectromechanical system (MEMS) resonators in high-temperature environments poses a difficult topic due to the thermal interference and the risk of high-temperature failure.
Zilong Zhang +4 more
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Thin-Piezo on Single-Crystal Silicon Reactive Etched RF MEMS Resonators
IEEE Access, 2020 This paper demonstrates how a single crystal silicon wafer can be used to fabricate thinfilm piezoelectric-on-silicon (TPoS) resonators by utilizing a modified version of Single Crystal Silicon Reactive Etch and Metallization (SCREAM) process.
Adnan Zaman +3 more
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System-Level Mathematical Macro-Models of Logic MEMS Gates
Доклады Белорусского государственного университета информатики и радиоэлектроникиThe relevance of the study is due to the rapid development of microelectromechanical systems (MEMS), which are used as logic elements due to low power consumption, high reliability and the ability to reprogram during operation.
А. А. Solovev +2 more
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Micromachines, 2018 Monostable vibration can eliminate dynamic bifurcation and improve system stability, which is required in many microelectromechanical systems (MEMS) applications, such as microbeam-based and comb-driven resonators.
Lei Li +3 more
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MEMS Acoustic Emission Sensors
Applied Sciences, 2020 This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS) acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in materials with the transduction mechanisms of piezoresistivity, capacitance ...
Didem Ozevin
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Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout
Microsystems & NanoengineeringTerahertz (THz) detectors using MEMS resonators have attracted great interests owing to their high sensitivity, rapid response, and room-temperature operation capability.
Ya Zhang +8 more
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Crossed ring anchored disk resonator for self-alignment of the anchor
Journal of Advanced Research, 2014 Misalignment is a problematic challenge in RF MEMS resonators. It causes asymmetry in the ultra symmetric radial contour mode disk resonators and degrades their performance by increasing the insertion loss and decreasing their quality factors (Q).
Masoud Baghelani +2 more
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AIP Advances, 2019 We have fabricated two-dimensional nanometer-scale hole array structures on GaAs doubly-clamped microelectromechanical system (MEMS) beam resonators to modulate their thermal properties. Owing to the reduction in the thermal conductance of the MEMS beams
Ya Zhang +5 more
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Electrochemical pyrolytic carbon resonators for mass sensing on electrodeposited polymers
Micro and Nano Engineering, 2019 In this work, we present the fabrication and characterization of a sensor combining electrochemistry with mass sensing. The sensor was realized using pyrolytic carbon, which is highly suitable as electrode material.
Long Nguyen Quang +6 more
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Multi-Material Radial Phononic Crystals to Improve the Quality Factor of Piezoelectric MEMS Resonators. [PDF]
Micromachines (Basel), 2023 Yang Q, Gao T, Zhu C, Li L.
europepmc +1 more source