Results 111 to 120 of about 2,034 (154)
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Modeling of RF- MEMS BAW Resonator
2010 23rd International Conference on VLSI Design, 2010Due to the demand of smaller and more portable devices the applications of MEMS resonators are rapidly increasing. Solidly Mounted Resonators (SMR) based on Bulk Acoustic Wave (BAW) technology follow MEMS principles to build high performance microwave filters for RF communication. In this paper we will provide the architecture of SMRs by discussing the
Ambarish Roy +2 more
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Packaging influences on the reliability of MEMS resonators
Microelectronics Reliability, 2008In this paper, the effect of assembly processes on the reliability of MEMS resonators is investigated. The common functions of MEMS resonators in the current technology are described as well as the most common designs. Virtual prototyping of a resonator during several assembly steps is used to estimate their influence. Experiments are executed in order
Jeroen J. M. Zaal +5 more
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Modelling MEMS Resonators Past Pull-In
Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B, 2008In this paper, we develop a mathematical model of an electrostatic MEMS beam undergoing impact with a stationary electrode subsequent to pull-in. We model the contact between the beam and the substrate using a nonlinear foundation of springs and dampers.
Chandrika P. Vyasarayani +3 more
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Piezoelectric MEMS Resonators: A Review
IEEE Sensors Journal, 2021Since two decades piezoelectric MEMS resonator research has been making a headway by leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and system design, monolithic integration, packaging, material engineering, etc.
Gayathri Pillai, Sheng-Shian Li
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2015
Resonant microelectromechanical systems (MEMS) are characterized by sub-millimeter-sized components that are able to oscillate. Depending on the actuation method, these resonant MEMS are implemented, e.g., as electrostatic, electrothermal, magnetostatic or piezoelectric devices.
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Resonant microelectromechanical systems (MEMS) are characterized by sub-millimeter-sized components that are able to oscillate. Depending on the actuation method, these resonant MEMS are implemented, e.g., as electrostatic, electrothermal, magnetostatic or piezoelectric devices.
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IEE Seminar and Exhibition on MEMS Sensor Technologies, 2005
A mechanical magnetometer fabricated using deep dry etched SOI was presented. It utilises the Lorenz force generated by a current passing through a magnetic field to actuate a MEMS structure. Operating at the resonant frequency of the MEMS structure, Q amplification is used to pick off small magnetic fields.
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A mechanical magnetometer fabricated using deep dry etched SOI was presented. It utilises the Lorenz force generated by a current passing through a magnetic field to actuate a MEMS structure. Operating at the resonant frequency of the MEMS structure, Q amplification is used to pick off small magnetic fields.
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Simultaneous Resonances of Electrostatically Actuated MEMS Resonators
Volume 8: 26th Conference on Mechanical Vibration and Noise, 2014This paper deals with simultaneous resonance of MEMS cantilever resonator sensors under double electrostatic actuation. The system consists of a MEMS cantilever between two parallel fixed plates. The two frequencies of actuation are one near natural frequency, and the other near half natural frequency.
Dumitru I. Caruntu, Christian Reyes
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Measurement uncertainties in resonant characteristics of MEMS resonators
Journal of Mechanical Science and Technology, 2013This paper reports measurement of random uncertainties in resonant characteristics (resonance frequency and quality factor) of microelectromechanical system (MEMS) resonators. We employ different methods to extract resonant characteristics of 4 different MEMS resonators which are either clamped-free or clamped-clamped beams.
Il Lee, Jungchul Lee
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Voltage Elevator using a MEMS Resonator
2007 IEEE International Symposium on Circuits and Systems (ISCAS), 2007This paper proposes a new approach to realize a voltage elevator using a single MEMS capacitor with movable plates. This device works in resonant mode, and this feature allows for the use of low input voltage. Complete electrical and mechanical equivalent SIMULINK models have been designed.
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Parametric Resonance of MEMS Circular Plate Resonators
Volume 8: 27th Conference on Mechanical Vibration and Noise, 2015This paper investigates parametric resonance of electrostatically actuated MEMS circular plates for resonator sensing applications. The system consists of a clamped circular elastic plate over a ground plate. Soft AC voltage of frequency near natural frequency of the plate gives the electrostatic force that leads the elastic plate into vibration, more ...
Dumitru I. Caruntu, Reynaldo Oyervides
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