Results 171 to 180 of about 1,249,343 (219)
MEMS Varifocal Optical Elements for Focus Control. [PDF]
Micromachines (Basel)Liu C +5 more
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From optical architectures to actual deployment a review of online process spectroscopy in industrial environments. [PDF]
Front ChemZhuo H +6 more
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Multimodal photoacoustic arthroscopy for quantitative morphomechanical assessment of articular cartilage. [PDF]
J Orthop TranslatLi R +14 more
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A Metrology-Driven Self-Calibration Framework for Terrestrial Laser Scanner Sensor Systems. [PDF]
Sensors (Basel)Yuan H, Li G, Wang L, Li X.
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OCT-guided angle-resolved low-coherence interferometry for microstructural analysis of the human retina. [PDF]
Biomed Opt ExpressMiller DA, Price HB, Wang W, Wax A.
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Integrating Optics and Parametrically-Resonant Micro-Scanner Design for Large Working Distance Implantable Microscopy. [PDF]
IEEE ASME Trans MechatronSahraeibelverdi T +6 more
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Microsystem Technologies, 2007
This paper introduces the development of a new MEMS-based optical mirror, which performs optical scanning function with discrete reflection angles in an out-of-plane configuration. The device was fabricated through Deep Reactive Ion Etching (DRIE) process on silicon-on-insulator (SOI) wafer, followed by assembly with two metalised glass dies.
Z. F. Wang +4 more
openaire +1 more source
This paper introduces the development of a new MEMS-based optical mirror, which performs optical scanning function with discrete reflection angles in an out-of-plane configuration. The device was fabricated through Deep Reactive Ion Etching (DRIE) process on silicon-on-insulator (SOI) wafer, followed by assembly with two metalised glass dies.
Z. F. Wang +4 more
openaire +1 more source
SPIE Proceedings, 2004
A 1500-μm-diameter silicon/silicon nitride 3D scan mirror has been built using MEMS technology. It is capable of static and dynamic beam scanning achieved with a bi-axial gimbal. A gold-coated deformable membrane at the center of the device provides both focus control (z-axis) and spherical aberration correction.
Yuhe Shao, David L. Dickensheets
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A 1500-μm-diameter silicon/silicon nitride 3D scan mirror has been built using MEMS technology. It is capable of static and dynamic beam scanning achieved with a bi-axial gimbal. A gold-coated deformable membrane at the center of the device provides both focus control (z-axis) and spherical aberration correction.
Yuhe Shao, David L. Dickensheets
openaire +1 more source
Coherent LiDAR Prototype Based on 2D MEMS Mirror Scanning
Optical Fiber Communication Conference (OFC) 2023, 2023We present a new coherent LiDAR prototype with two-dimensional micro-electro-mechanical-system scanning and walk-off mitigation capability. We address the linearization challenge of the FMCW transmitter, the scan-capture-synchronization and pro-vide point-clouds of two distinct objects.
Sarah Cwalina +4 more
openaire +2 more sources