Results 181 to 190 of about 1,249,343 (219)

Photoacoustic endomicroscopy based on a MEMS scanning mirror

Optics Letters, 2017
In this Letter, we present a high-resolution photoacoustic endomicroscopy probe based on a microelectromechanical systems (MEMS) scanning mirror. The built-in optical assembly consists of a 0.7 mm graded-index (GRIN) lens for light focusing and a ϕ1  mm MEMS mirror to reflect and scan the beam.
Heng Guo, Chaolong Song, Huikai Xie, Lei Xi   +3 more
openaire   +2 more sources

MEMS scanning mirror with tunable natural frequency

The Journal of the Acoustical Society of America, 2006
In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source.
FU YEE-CHUNG, KUO TING-TUNG
openaire   +4 more sources

Selective Infiltration Damping of MEMS Scanning Mirrors

2018 International Conference on Optical MEMS and Nanophotonics (OMN), 2018
Quasi-static MEMS scanning mirrors are used for optical beam steering on arbitrary trajectories. They have to provide a broad mechanical bandwidth depending on the desired speed. In this work an approach by passive damping of the MEMS mirrors with gel droplets is described, that allows to increase the usable bandwidth.
Georg Widholz, Stefan Richter, Robert Brunner   +2 more
openaire   +1 more source

Single-pixel, MEMS scanning mirror camera

IEEE Photonic Society 24th Annual Meeting, 2011
In this summary we describe and demonstrate a “single-pixel camera,” where a single photodiode, imaging lens, and micro-electro-mechanical systems (MEMS) bi-axial scanning mirror are used to create a passive imaging system that collects environmental light in a scanned-detection scheme.
Weston Aenchbacher, Timothy Kurzweg
openaire   +1 more source

Design and fabrication of a MEMS scanning mirror with and without comb offset

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, 2010
The design, fabrication and characterization of an electrostatic-type bi-axial MEMS scanning mirror operating with inter-digitated comb fingers are presented. The effect of comb offset on device actuation is examined. In addition to standard designs with and without comb offset, a novel asymmetric mirror plate was designed to introduce an imbalance. It
Yick Chuen Chan, Chun Cheong Wong, Congshun Wang, Wei Ma, Ho-Yin Chan, Shoulung Chen, Hon Lung Cheung, Francis Chee Shuen Lee, Chen-Jung Tsai   +8 more
openaire   +2 more sources

Optical spectrum analyzer utilizing MEMS scanning mirror

IEEE Photonics Technology Letters, 2006
An optical spectrum analyzer (OSA) has been newly developed by the authors, utilizing a microelectromechanical system scanning mirror with 1.7-ms scan speed for the C-band and a wavelength resolution of 10 pm. This new OSA is suitable for wavelength-division-multiplexing performance monitoring that requires high speed and high wavelength resolution.
T. Saitoh, K. Nakamura, Y. Takahashi, K. Miyagi   +3 more
openaire   +1 more source

Magnetically Driven Actuators for Vector Scanning Mems Mirrors

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019
This paper reports a new type of magnetic actuator, for which a unique technique to integrate NdFeB into Si is utilized. In order to develop the driving concept different device designs and coils have been employed for evaluating the force generation. High force of up to 0.01 N was measured by activating one single micro-magnet.
Shanshan Gu-Stoppel, Marec Timmermann, Thomas Lisec, Fabian Lofink   +3 more
openaire   +1 more source

An integrated optoelectronic position sensor for MEMS scanning mirrors

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017
Piezoresistive strain gauges are usually used to measure position and displacement for MEMS scanning mirrors with torsional silicon bars, but this method cannot be applied to gimbal-less 2-axis electrothermal bimorph micromirrors since they do not have torsional silicon bars. This paper reports an integrated optoelectronic position sensor (iOE-PS) that
Xiang Cheng, Hangquan Lu, Zhuoge Lou, Huikai Xie, Wei Wang, Ming Zheng   +5 more
openaire   +1 more source

MEMS Mirrors Submerged in Liquid for Wide-Angle Scanning

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015
This paper reports an electrothermal MEMS scanning mirror working in liquid for the first time. By submerging the MEMS mirror into a mineral oil whose refractive index is 1.47, a wide-angle optical scan (>120°) was achieved at small driving voltage (
Sanjeev J Koppal, Huikai Xie, Xiaoyang Zhang   +2 more
exaly   +2 more sources

Mems Electromagnetic Micro Scanning Mirrors for Lidar Applications

Journal of Micromechanics and Microengineering
Abstract Scanning micro mirrors, as important devices for LiDAR scanning and imaging, require both high resonant frequencies and large scanning angles. Currently, MEMS scanning micro mirror production for LiDAR applications remains costly, with few existing solutions capable of simultaneously achieving wide-angle scanning at high ...
Chen LI, Xuan Yang, Shuai Chen, Jie Li, Jiahao Tang   +4 more
openaire   +2 more sources