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Modeling of biaxial gimbal-less MEMS scanning mirrors
SPIE Proceedings, 2016One- and two-dimensional MEMS scanning mirrors for resonant or quasi-stationary beam deflection are primarily known as tiny micromirror devices with aperture sizes up to a few Millimeters and usually address low power applications in high volume markets, e.g. laser beam scanning pico-projectors or gesture recognition systems.
von Wantoch, Thomas +6 more
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A MEMS mirror driver ASIC for beam-steering in scanning MEMS-based LiDAR
Laser Beam Shaping XIX, 2019In this paper, a MEMS mirror driver ASIC that operates a 1D MEMS mirror with accurate amplitude is presented. It provides a set of position signals, precisely aligned to the MEMS mirror that enables a beam forming and laser shooting scheduling for LiDAR (Light Detection and Ranging) applications.
Ievgeniia Maksymova +4 more
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2012 International Conference on Optical MEMS and Nanophotonics, 2012
We present a three-dimensional confocal scanning microscope using MEMS scanners for both the lateral and the axial scan. The lateral scan is performed by an electrothermal two-axis MEMS mirror that is capable of scanning large angles up to ± 20° at low driving voltages less than 4.5 V.
Lin Liu, Huikai Xie
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We present a three-dimensional confocal scanning microscope using MEMS scanners for both the lateral and the axial scan. The lateral scan is performed by an electrothermal two-axis MEMS mirror that is capable of scanning large angles up to ± 20° at low driving voltages less than 4.5 V.
Lin Liu, Huikai Xie
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Fabrication and Packaging of Electromagnetic 2D MEMS Scanning Mirror
Key Engineering Materials, 2014The scanning mirror has two gimbals structure, which are supported perpendicularly to each other by torsion beams. Dual-axis movement of the mirror is achieved by the tilt of inner and outer structures, respectively. The electromagnetic 2D MEMS scanning mirror is fabricated using a bulk silicon process, mainly including the wet etching, electroplating ...
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Scanning Angle Control of MEMS Micro-mirror Used in LIDAR
2022 IEEE International Conference on Real-time Computing and Robotics (RCAR), 2022Yonghong Tan 0001 +3 more
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MEMS scanning mirror with tunable natural frequency
The Journal of the Acoustical Society of America, 2009Yee-Chung Fu, Ting-Tung Kuo
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Laser scanner using macro scanning structure and a MEMS scanning mirror
2023HOFBAUER ANDREAS +3 more
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