Results 141 to 150 of about 2,189 (167)

Design and analysis of micromechanical resonant accelerometer

2012 8th IEEE International Symposium on Instrumentation and Control Technology (ISICT) Proceedings, 2012
A novel micro resonant accelerometer was designed for increasing the sensitivity of resonant accelerometer, which includes two double-ended tuning forks, a proof mass, two-leverage system amplifying inertial force, and drive/sense combs. Each tuning fork is electro-statically actuated and sensed at resonance using comb electrodes.
Jing Li, Shangchun Fan, Cheng Li, Guo Zhanshe, Gao Shi Qiao, Liu Hai Peng   +5 more
openaire   +1 more source

Pendulum Micromechanical Angular Accelerometer with Force Feedback

2007 International Conference on Mechatronics and Automation, 2007
This paper bring forward a kind of pendulum micromechanical angular accelerometer with force feedback, which might be proposed by us, first. The sensor adopts a pendulum with mass joined to the anchors by a pair torsion-spring beams as sensing device, differential-capacitor device for detecting the angular acceleration about the X axis, an ...
null Li Jianli, Fang Jiancheng, Sheng Wei   +2 more
openaire   +1 more source

Micromechanical accelerometers based on surface acoustic waves

2014 NORCHIP, 2014
The fundamentals of the theory of surface acoustic waves (SAW) and the principles of construction of differential SAW-based converters are disclaimed. The concept of constructing a SAW-based microaccelerometer, which allows to provide the stability of the device operation in a wide temperature range, is presented. Calculation of the optimal form of the
D. Lukyanov, S. Shevchenko, A. Kukaev, E. Filippova, D. Safronov   +4 more
openaire   +1 more source

Micromechanical accelerometer integrated with MOS detection circuitry

1980 International Electron Devices Meeting, 1980
A cantilever beam accelerometer has been demonstrated in which the small cantilever sensing element is integrated with and fabricated alongside MOS detection circuitry. Fully compatible and conventional materials and processing steps are employed throughout the fabrication schedule.
K. Petersen, A. Shartel
openaire   +1 more source

The Micromechanical Accelerometer and the Micromechanical Gyroscope

2017
The micromechanical inertial sensors in the fabrication of micromechanical technology mainly include the micromechanical accelerometer and the micromechanical gyroscope.
Fuxue Zhang, Wei Zhang, Guosheng Wang
openaire   +1 more source

Research of the micromechanical three-axis accelerometer

SPIE Proceedings, 2016
In the report the linear acceleration sensor design with three axis of sensitivity is researched. Parameterized geometry and finite element model for modal analysis are developed in the ANSYS program. Behavioral description of the study design is developed with language VHDL-AMS to simulate the sensor operation under the influence of linear ...
B. Konoplev, I. Lysenko, E. Ryndin, O. Ezhova, F. Bondarev   +4 more
openaire   +1 more source

Silicon micromechanical accelerometer using an optical fiber

SPIE Proceedings, 2002
In this paper, a new type of silicon micro-mechanical accelerometer using an optical fiber is presented. The mechanical element of the accelerometer is fabricated by an unconventional wet etching process of silicon, resulting in symmetrically suspended seismic masses with a high lateral sensitivity and very low transverse sensitivities.
Tongyu Wang, Shuren Zhang
openaire   +1 more source

Phase noise analysis of micromechanical silicon resonant accelerometer

Sensors and Actuators A: Physical, 2013
Abstract The phase noise in micromechanical silicon resonant accelerometer (SRA) can perturb its frequency output and determines the minimum detectable change in acceleration (sensor resolution). In order to improve the resolution and optimize the sensor performance, the phase noise of SRA is studied in this paper. Theoretical model of phase noise of
Ran Shi, Fang-xiu Jia, An-ping Qiu, Yan Su   +3 more
openaire   +1 more source

Temperature Self-Compensation of Micromechanical Silicon Resonant Accelerometer

Applied Mechanics and Materials, 2013
Temperature is one of the most important factors affecting the accuracy of micromechanical silicon resonant accelerometer (SRA). In order to reduce the temperature sensitivity and improve the sensor performance, a new method of temperature self-compensation for SRA is presented in this paper. Utilizing the differential structure of SRA, the temperature
Ran Shi, Jian Zhao, An Ping Qiu, Guo Ming Xia   +3 more
openaire   +1 more source

Temperature influence mechanism of micromechanical silicon oscillating accelerometer

2011 IEEE Power Engineering and Automation Conference, 2011
Bias value and scale factor (SF) are two main performance indexes of silicon oscillating accelerometer(SOA). A deep research on that how temperature influence the performance of SOA by changing the effective stiffness of resonators, is made so as to reduce the temperature sensitivity of it in this paper.
Jin-hu Dong, An-ping Qiu, Ran Shi
openaire   +1 more source