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Mechanisms and results in MOVPE
Vacuum, 1990Abstract In this paper the relevant mechanisms for Metal Organic Vapour Phase Epitaxy (MOVPE) are summarized. The hydrodynamical aspects of gas phase transport are discussed but emphasis is put on the reaction routes leading to precursor decomposition and layer growth.
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MOVPE of AlInAs HEMT structures
Journal of Crystal Growth, 1991Abstract The growth by MOVPE and device applications of AlInAs HEMT structures have been reported by several groups over the past few years. This paper reviews the technological achievements up to date, presents recent results on AlInAs HEMTs and discusses future requirements and approaches to the growth of AlInAs HEMT structures suitable for high ...
Leye Aina +3 more
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MOVPE of crystalline Ge1Sb2Te4 (GST)
2014Chalcogenide phase change materials show significant promise on the road to an ideal memory. Ge-Sb-Te alloys (GST) are considered to be one of the most suitable compounds for this application and are already widely used as non-volatile phase change memory in optical data storage and in first PRAM (Phase-change Random Access Memory) devices today [1, 2].
Schuck, Martin +6 more
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