Results 81 to 86 of about 98 (86)

Method of developing optimized optical proximity correction (OPC) fragmentation script for photolithographic processing

2006
BABCOCK CARL, CAPODIECI LUIGI
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Method of verifying an optical proximity correction (OPC) model

2006
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ADAPTIVE TARGET CONTROL FOR CURVILINEAR OPTICAL PROXIMITY CORRECTION (OPC)

LIPPINCOTT GEORGE P, KAUR AVNEET
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Optical proximity correction (OPC) method for improving lithography process window

2001
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Identify Optical Proximity Correction (OPC) issue in 0.13 μm technology development

exaly  

Optical proximity correction (OPC) technique using generalized figure of merit for photolithograhic processing

2005
openaire   +1 more source