Results 111 to 114 of about 17,661 (114)

Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co

Applied Physics Letters, 2007
Han-Bo-Ram Lee, Hyungjun Kim
exaly  

Topographic Selective Deposition (TSD) by Combining Plasma Enhanced Atomic Layer Deposition and Atomic Layer Etching Processes

2021
Jaffal, Moustapha, Lefevre, Gauthier, Yeghoyan, Taguhi, Chevolleau, Thierry, Gassilloud, Rémy, Posseme, Nicolas, Bonvalot, Marceline   +6 more
openaire   +1 more source

Effects of O2 plasma treatment on moisture barrier properties of SiO2 grown by plasma-enhanced atomic layer deposition

Ceramics International, 2019
Yujin Lee, Seunggi Seo, Il-Kwon Oh
exaly  

Optimization of Plasma-Enhanced Atomic Layer Deposition of Cobalt for Interconnects

2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Sandra Schujman, Natalya Tokranova, Van Long Nguyen, Christophe Vallée, Vidya Kaushik   +4 more
openaire   +1 more source