Results 101 to 110 of about 17,661 (114)

Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2018
Saravana Balaji Basuvalingam, Bart Macco, Harm C M Knoops   +2 more
exaly  

Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2017
Remy Gassilloud, C Vallée, Vallée Christophe   +2 more
exaly  

Formation of Ru nanocrystals by plasma enhanced atomic layer deposition for nonvolatile memory applications

Applied Physics Letters, 2006
Ki-Su Kim, Ki-Bum Kim, Kim Ki-Bum
exaly  

Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2019
Lizhen Yang, Haibao Zhang, Zhongwei Liu   +2 more
exaly  

Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2012
Jaakko Niinisto, Marko Vehkamäki, Marianna Kemell   +2 more
exaly  

An N‐Heterocyclic Carbene Based Silver Precursor for Plasma‐Enhanced Spatial Atomic Layer Deposition of Silver Thin Films at Atmospheric Pressure

Angewandte Chemie - International Edition, 2018
Nils Boysen, Detlef Rogalla, Manuela Winter   +2 more
exaly  

Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2005
Jane P Chang, Chang Jane P
exaly  

Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films

Applied Physics Letters, 2012
S M Prokes, O J Glembocki, Joshua D Caldwell   +2 more
exaly  

Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition

Applied Catalysis B: Environmental, 2009
Chang-Soo Lee, Jungwon Kim, J Y Son
exaly  

Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2019
Igor Krylov, Yuanshen Qi, Kamira Weinfeld   +2 more
exaly