Results 121 to 130 of about 27,823 (260)

Microstructural characterization and inductively coupled plasma-reactive ion etching resistance of Y2O3–Y4Al2O9 composite under CF4/Ar/O2 mixed gas conditions

Scientific Reports
In the semiconductor manufacturing process, when conducting inductively coupled plasma-reactive ion etching in challenging environments, both wafers and the ceramic components comprising the chamber’s interior can be influenced by plasma attack.
Ho Jin Ma, Seonghyeon Kim, Ha-Neul Kim, Mi-Ju Kim, Jae-Woong Ko, Jae-Wook Lee, Jung-Hyung Kim, Hyo-Chang Lee, Young-Jo Park   +8 more
doaj   +1 more source

Grafted Low‐Leakage Si/AlN p‐n Diodes Enabled by Fluorinated AlN Interface

Advanced Materials Interfaces, EarlyView.
This work demonstrates a fluorination‐based interface engineering strategy that transforms oxygen‐terminated AlN surfaces into fluorine‐terminated interfaces for grafted p‐Si/n‐AlN diodes. By combining pseudo‐ALE oxide removal, XeF2 fluorination, and ultrathin SiNx stabilization, the engineered interface suppresses defect‐assisted reverse leakage by ...
Yi Lu, Tsung‐Han Tsai, Qingxiao Wang, Haicheng Cao, Jie Zhou, You Jin Koo, Chenyu Wang, Yang Liu, Yuyue Hao, Michael Eller, Connor Bailey, Stephanie Liu, Nicholas J. Tanen, Zhiyuan Liu, Mingtao Nong, Robert M. Jacobberger, Tien Khee Ng, Katherine Fountaine, Vincent Gambin, Boon S. Ooi, Xiaohang Li, Zhenqiang Ma   +21 more
wiley   +1 more source

Plasma and Gas‐based Semiconductor Technologies for 2D Materials with Computational Simulation & Electronic Applications

Advanced Electronic Materials
The technique of plasma processing is beneficial for wafer cleaning and precision etching of integrated circuits and essential in manufacture of advanced semiconductor devices with unmatched perfection. Research on two‐dimensional (2D) materials, such as
Changmin Kim, Muyoung Kim, Seongho Kim, Minji Kang, Min Sup Choi, Hyeong‐U Kim   +5 more
doaj   +1 more source

Doping density, not valency, influences catalytic metal-assisted plasma etching of silicon.

Mater Horiz, 2023
Sun JB, Peimyoo N, Douglas JO, Almquist BD.   +3 more
europepmc   +1 more source

High Quality MoS2 Layered Thin Films Obtained by Ionized Jet Deposition Investigated by X‐ray Absorption Spectroscopy at S L2,3 and Mo M2,3 Edges

Advanced Materials Interfaces, EarlyView.
Soft x‐ray absorption spectroscopy at the S L2,3 and Mo M2,3 edges reveals synthesis‐dependent electronic and structural order in MoS2. Bulk, exfoliated, and CVD samples show well‐resolved 2D features, while as‐deposited IJD films appear amorphous but crystallize into ordered 2H‐MoS2 upon moderate annealing, confirming IJD as a viable low‐temperature ...
Giulia Giovanelli, Alessandro Lodi, Angelo Giglia, Nicola Mahne, Rahul Kesarwani, Jana Vejpravova, Steffen Rühl, Giovanni Ligorio, Emil J. W. List‐Kratochvil, Lucia Nasi, Melanie Timpel, Marco V. Nardi, Luca Pasquali   +12 more
wiley   +1 more source

Cation‐π Interaction‐Based Biointerface for Low‐Cost PD‐1 Detection Toward NSCLC Immunotherapy Monitoring

Advanced Materials Interfaces, EarlyView.
A cation‐π interaction‐based biointerface is engineered on a CNT‐FET for label‐free detection of PD‐1. PD‐1 monoclonal antibodies are orientedly immobilized via cation‐π interactions between PCz‐wrapped semiconducting single‐walled carbon nanotubes and the Fc region of the monoclonal antibody.
Chunmin Jia, Yimin Lei, Hong Xu, Xin Meng, Yuxiang Wei, Peixian Li, Xiaohua Ma, Yue Hao, Xiaohui Jia   +8 more
wiley   +1 more source

Flexible Wide Bandgap Electrode System for In situ Cell Sensing and Irreversible Electroporation

Advanced Materials Interfaces, EarlyView.
The paper reports the design and wafer‐level microfabrication of a long‐lived, flexible 3C‐SiC electrode capable of sensitive and in situ cell sensing, as well as electroporation ablation. The work demonstrates a biocompatible and durable electrode platform that can perform reliable electrical interfacing with biological tissues over extended periods ...
Minh Anh Huynh, Sharda Yadav, Tuan‐Khoa Nguyen, Nam‐Trung Nguyen   +3 more
wiley   +1 more source

Al2O3 Ring Array by Infiltration Synthesis in Polystyrene Antidot Template

Advanced Materials Interfaces, EarlyView.
Different morphologies, such as full dots for genuine PS‐b‐PMMA, residual dots for the PS antidot array (resulting from an Acetic Acid (AA) last PS‐b‐PMMA), and rings for the modified PS antidot array (derived from an O2 plasma last PS‐b‐PMMA), originated from SIS process in PS‐b‐PMMA BCP array, due to the different reaction sites for the TMA precursor
Gabriele Seguini, Alessia Motta, Jacopo Frascaroli, Guido Rademaker, Ahmed Gharbi, Raluca Tiron, Michele Perego, Graziella Tallarida   +7 more
wiley   +1 more source

Development of Energy-Efficient Superhydrophobic Polypropylene Fabric by Oxygen Plasma Etching and Thermal Aging. [PDF]

Polymers (Basel), 2020
Kim S, Oh JH, Park CH.
europepmc   +1 more source

Large‐Scale and Cost‐Effective Fabrication of Ultra‐Thin, Biodegradable Microelectrode Arrays and Pressure Sensors Using Laser Micromachining

Advanced Materials Technologies, EarlyView.
A mask‐free and cost‐effective UV‐pico‐second laser‐based microfabrication method is proposed to fabricate large‐area biodegradable microelectrode arrays and pressure sensors. These devices demonstrate low impedance, good conformability, excellent biocompatibility, and rapid degradation, providing a new route for next‐generation transient electronics ...
Bhavani Prasad Yalagala, Asfand Tanwear, María Cerezo‐Sánchez, Hossein Parvizi, Morteza Amjadi, Hadi Heidari   +5 more
wiley   +1 more source