Results 51 to 60 of about 27,823 (260)

Analysis of Current Research Status of Plasma Etch Process Model

Journal of Microelectronic Manufacturing, 2018
This paper summarizes the status of the plasma etch process modeling research. It mainly introduces typical etching models employing the analytical method, geometric method, system identification method, basic principle simulation method, as well as ...
Xiaoting Li, Rui Chen, Lei Qu, Xuanmin Zhu, Jing Zhang, Yanrong Wang, Shuhua Wei, Jiang Yan, Yayi Wei   +8 more
doaj   +1 more source

Graphene Quantum Dot‐Induced Microstrain for Framework Stabilization of High‐Entropy Prussian Blue Analog in High‐Current Alkaline Hydrogen Evolution Reaction

Advanced Functional Materials, EarlyView.
The intrinsic distortion‐rich lattice of HEPBA with GQD‐enabled microstrain engineering establishes a mechanistic route toward high‐performance alkaline hydrogen evolution reaction. HEPBA inherently feature heterogeneous local coordination environments arising from multimetal incorporation, while properly introducing GQD during coprecipitation ...
Mia Rinawati, Yu‐Ru Liu, Wei‐Hsiang Huang, Kuan‐Yu Lin, Ching‐Ju Ho, Ling‐Yu Chang, Karel Roubik, Ni Luh Wulan Septiani, Ahmad Nuruddin, Wei‐Nien Su, Min‐Hsin Yeh   +10 more
wiley   +1 more source

Fabrication of air bridges on (100) β-Ga2O3 using crystallographic HCl gas etching

AIP Advances
β-Ga2O3 air bridges on (100) substrates were fabricated through a self-aligning process that used conventional anisotropic BCl3/Ar-plasma etching and crystallographic plasma-free HCl gas ...
Takayoshi Oshima, Yuichi Oshima
doaj   +1 more source

Transfer of micron pattern with reactive atmospheric plasma jets into fused silica

Applied Surface Science Advances
Pattern transfer by plasma etching is a traditional standard technology in microelectronics and other micron technologies. These technologies require vacuum conditions, which limit throughput, size, and low-cost fabrication.
Martin Ehrhardt, Pierre Lorenz, Joachim Zajadacz, Robert Heinke, Thomas Arnold, Klaus Zimmer   +5 more
doaj   +1 more source

Extraordinary n‐type Tellurium‐Free Thermoelectric Performance of Y‐Doped BiSe via Synergistic Effect of Vacancies and Band Engineering

Advanced Functional Materials, EarlyView.
Yttrium doping in Sb‐alloyed BiSe synergistically induces Bi vacancies and flattens conduction bands, simultaneously slashing lattice thermal conductivity by 50% and boosting the power factor. The optimized n‐type Bi0.64Sb0.3Y0.06Se delivers a peak zT of 0.91 at 393 K (average zT 0.76, 300–523 K) and an 8‐pair module with 4.6% conversion efficiency ...
Wenhao Xie, Fang Lyu, Xiaolong Sun, Chang Li, Xiaolu Zhu, Liangwei Hu, Qianfeng Ding, Wenjie Zhou, Muyang Huang, Yineng Gou, Yi Zhao, Han Tang, Wei Cao, Yue Hou, Yun Zheng, Ady Suwardi, Ziyu Wang   +16 more
wiley   +1 more source

Multimode Oxide‐Based Optoelectronic Memtransistor for In‐Sensor Vision Processing

Advanced Functional Materials, EarlyView.
A multimode optoelectronic memtransistor (OEMT) is demonstrated for vision explainable artificial intelligence (VXAI) hardware. By integrating optical sensing, electrical masking, and non‐volatile memory, the device enables key operations required for generating saliency information.
Min Gu Lee, Geunyoung Kim, Hwa Young Kim, Do Hoon Kim, Hanchan Song, Huisu Noh, Jungwan Noh, Seungwoo Lee, Sang‐Hee Ko Park, Himchan Cho, Kyung Min Kim   +10 more
wiley   +1 more source

Impact of Ar/CF₄ Mixed Gas Flow Rate on Silicon Etching Using Surface Discharge Plasma

Applied Sciences
This study examines the effects of varying argon (Ar) and carbon tetrafluoride (CF4) gas flow rates on the etching of monocrystalline silicon substrates using surface discharge plasma.
Toshiyuki Hamada, Kazuki Nishida, Masafumi Yoshida   +2 more
doaj   +1 more source

Si‐Doped Nanocrystalline Diamond as Highly Sensitive Luminescence Thermometer for the Physiological Temperature Range

Advanced Functional Materials, EarlyView.
In this work, diamonds with negative charged silicon‐vacancy (SiV−) centers have been designed for use as thermometers in biomedical applications. Multiparametric analysis of the emission characteristics of the SiV− centers provides extraordinary sensitivity for temperature detection in the physiological temperature range.
María Gragera, Iván Carrillo‐Berdugo, Josue Millán, Paulius Pobedinskas, Antonio Freire, Ken Haenen, Javier Navas   +6 more
wiley   +1 more source

Evolution of surface morphology and properties of diamond films by hydrogen plasma etching

Green Processing and Synthesis, 2023
The micron-scale diamond film was prepared using hydrogen and methane as the mixed gas supplies via self-developed 3 kW/2,450 MHz microwave plasma chemical vapor deposition (MPCVD) equipment.
Chu Genjie, Li Sijia, Gao Jiyun, Yang Li, Hou Ming, Guo Shenghui   +5 more
doaj   +1 more source

Silicone Phase Behavior Resolves the Softness–Surface Functionality Trade‐Off in Emerging Stretchable Electronics

Advanced Functional Materials, EarlyView.
Ultrasoft silicone elastomers often sacrifice surface functionality for mechanical compliance. In Mold Star, low‐molecular‐weight species form a dispersed phase that weakens the network and passivates the surface. Solvent extraction removes this phase, unexpectedly improving both extensibility and metallization performance, enabling conductive ...
Gloria M. D'Amaral, Rahaf Nafez Hussein, Tiago Carneiro Gomes, Jordan E. Nicholson, Lauren J. Renaud, Emily J. Addison, Simon Rondeau‐Gagné, Tricia Breen Carmichael   +7 more
wiley   +1 more source