Results 251 to 260 of about 2,582 (264)

Polishing pad for CMP, method for polishing substrate using it and method for producing polishing pad for CMP

2008
NISHIYAMA MASAYA, HABIRO MASANOBU, IWATSUKI YASUHITO, HIRAOKA HIROKAZU   +3 more
openaire   +1 more source

Polishing pad and method for polishing a semiconductor wafer

2013
SCHWANDNER JUERGEN, KOPPERT ROLAND
openaire   +1 more source

Polishing pad cluster for polishing a semiconductor wafer

1996
TALIEH HOMAYOUN, WELDON DAVID E
openaire   +1 more source

Self-conditioning of encapsulated abrasive pad in chemical mechanical polishing

Journal of Materials Processing Technology, 2003
exaly  

Factors influencing the dressing rate of chemical mechanical polishing pad conditioning

International Journal of Advanced Manufacturing Technology, 2006
exaly  

Metallized pad polishing process

1998
STAGER CHARLES W, KOBAYASHI THOMAS S, PAGE JOSEPH E, ZALESKI MARK A, WINEBARGER PAUL M   +4 more
openaire   +1 more source

Polishing pad with window

2006
openaire   +1 more source

METHOD FOR MANUFACTURING A POLISHING SHEET AND A POLISHING PAD

AN JOONHO, SEO JANGWON, IM CHANG GYU, YUN JONG WOOK, KIM KYUNG HWAN   +4 more
openaire   +1 more source

Polishing pad support that improves polishing performance and longevity

2004
OBENG YAW S, THOMAS PETER A
openaire   +1 more source

Conductive polishing pad and method for making the same

2010
FENG CHUNG-CHIH, YAO I-PENG, HUNG YUNG-CHANG, WANG CHUN-TA   +3 more
openaire   +2 more sources