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METHOD OF DETERMINING PERFORMANCE CHARACTERISTICS OF POLISHING PADS
2001KELLER KEVIN A, WHITMAN JR GERALD A
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Soft And Conditionable Chemical Mechanical Polishing Pad
2014QIAN BAINIAN +4 more
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Heterogeneous fluoropolymer mixture polishing pad
GADINSKI MATTHEW R, SO JOSEPHopenaire +1 more source