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METHOD OF DETERMINING PERFORMANCE CHARACTERISTICS OF POLISHING PADS
2001KELLER KEVIN A, WHITMAN JR GERALD A
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Soft And Conditionable Chemical Mechanical Polishing Pad
2014QIAN BAINIAN +4 more
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Polishing pad support that improves polishing performance and longevity
2004OBENG YAW S, THOMAS PETER A
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