Results 51 to 60 of about 22,223 (308)
, 2022 S.303-306The Double Ring Magnetron DRM 400 is designed for stationary deposition of thin films with high uniformity on eight inch substrates. The DRM combines two concentric discharges in one magnetron source.
Goedicke, K., Frach, P., Bartzsch, H.
core
Structure of TiAlN reactive sputtered coatings
Журнал нано- та електронної фізики, 2012 The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N 2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-frequency bands in vibrational spectra was located at 700-
Denisov, V.N. +10 more
openaire +7 more sources
Study on photoelectricity properties of SiCN thin films prepared by magnetron sputtering
Journal of Materials Research and Technology, 2021 SiCN thin film is one of the most attractive silicon-based materials due to its excellent electrical, mechanical and optical properties. In this study, SiCN thin films have been prepared by the radio frequency reactive magnetron sputtering method under ...
Qiang Li +11 more
doaj +1 more source
Active Corrosion Protection of Sintered AA7075 Aluminum Alloy via Mn Powder Addition
Advanced Engineering Materials, EarlyView.AA7075 containing Mn‐rich particles is fabricated via spark plasma sintering using AA7075 and Mn powders. Corrosion resistance is evaluated through dip‐and‐dry tests using 0.1 M NaCl (pH 6.0), and mass loss decreases with increasing Mn addition. Mn‐rich particles function as a source of Mn ions, and formation of Mn‐accumulation films on Cu‐containing ...
Ko Ebina, Masashi Nishimoto, Izumi Muto
wiley +1 more source
Sputtering yield amplification for targets operated in reactive mode
, 2022 S.41-44In this work, we present simulations of the partial sputtering yields for individual elements in multielement targets sputtered in a reactive atmosphere.
Kubart, T. +5 more
core
Iraqi Journal of Physics, 2023 This study focuses on synthesizing Niobium pentoxide (Nb2O5) thin films on silicon wafers and quartz substrates using DC reactive magnetron sputtering for NO2 gas sensors. The films undergo annealing in ambient air at 800 °C for 1 hr.
Yahya R. Hathal +4 more
doaj +1 more source
Enhancing Low‐Temperature Performance of Sodium‐Ion Batteries via Anion‐Solvent Interactions
Advanced Functional Materials, EarlyView.DOL is introduced into electrolytes as a co‐solvent, increasing slat solubility, ion conductivity, and the de‐solvent process, and forming an anion‐rich solvent shell due to its high interaction with anion. With the above virtues, the batteries using this electrolyte exhibit excellent cycling stability at low temperatures. Abstract Sodium‐ion batteries
Cheng Zheng +7 more
wiley +1 more source
Obtenção e caracterização de filmes de TiO2 depositados sobre cerâmica de revestimento via magnetron sputtering DC [PDF]
, 2007 Tese (doutorado) - Universidade Federal de Santa Catarina, Centro Tecnológico. Programa de Pós-graduação em Ciência e Engenharia de MateriaisO dióxido de titânio (TiO2) na presença de luz ultravioleta atua como catalisador de reações químicas.
Pascoali, Suzy
core
, 2022 The state of the art to obtain crystalline TiO2 layers by vacuum deposition methods is the use of elevated substrate temperature during deposition or annealing after deposition above 250 °C.
Goedicke, K. +5 more
core
Growth of aluminum nitride on a silicon nitride substrate for hybrid photonic circuits
Materials for Quantum Technology, 2021 Aluminum nitride (AlN) is an emerging material for integrated quantum photonics with its excellent linear and nonlinear optical properties. In particular, its second-order nonlinear susceptibility χ ^(2) allows single-photon generation. We have grown AlN
G Terrasanta +6 more
doaj +1 more source