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Photopatterning of organic mixed ionic electronic conductors for monolithic complementary inverter. [PDF]
Xie X +7 more
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A review of commercial and laboratory-based microfluidic devices based on glass and/or silicon substrates. [PDF]
Deb A +5 more
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Dimensional Scaling Effect in Percolative Oxide Semiconductor Transistors. [PDF]
Tseng R +19 more
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Resistive switching memristors: structures, materials, fabrication techniques, and process challenges for VLSI integration. [PDF]
Singla R, Pant D, Nautiyal P, Painuly A.
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STARE: a semiconductor-integrated transmit-array architecture for 6G beamforming. [PDF]
Kim J, Kim B, Park M, Oh J, Oh J.
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Control of lithography in semiconductor manufacturing
IEEE Control Systems, 2006Lithography is important in semiconductor manufacturing because it affects both the performance and yield of the devices in each wafer. The formation of a layer in lithography equipment involves a series of steps, each of which requires process control, namely, surface preparation, spin coat, soft bake, alignment and exposure, post-exposure bake ...
Thomas F Edgar
exaly +2 more sources
Semiconductor lithography for the next millennium
IEEE Spectrum, 1996Volume production of ICs sporting 0.1-micrometer structures is being predicted for 2007. Manufacturing tools now being developed will feature much shorter wavelengths and elaborate mirrors in place of traditional lenses. Also being honed is proximity X-ray lithography, which has produced a first level of a memory circuit with 0.25-micrometer dimensions.
L Geppert
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Lithography for semiconductor technology
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997Abstract We present a short overview of lithography applied to semiconductor technology. It covers optical, X-rays, electrons and ions beam lithographies. The properties of resists and of the associated processes, which are the heart of this technology, are presented.
Christian NgĂ´, Charles Rosilio
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