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Dimensional Scaling Effect in Percolative Oxide Semiconductor Transistors. [PDF]

open access: yesACS Nano
Tseng R   +19 more
europepmc   +1 more source

Control of lithography in semiconductor manufacturing

IEEE Control Systems, 2006
Lithography is important in semiconductor manufacturing because it affects both the performance and yield of the devices in each wafer. The formation of a layer in lithography equipment involves a series of steps, each of which requires process control, namely, surface preparation, spin coat, soft bake, alignment and exposure, post-exposure bake ...
Thomas F Edgar
exaly   +2 more sources

Semiconductor lithography for the next millennium

IEEE Spectrum, 1996
Volume production of ICs sporting 0.1-micrometer structures is being predicted for 2007. Manufacturing tools now being developed will feature much shorter wavelengths and elaborate mirrors in place of traditional lenses. Also being honed is proximity X-ray lithography, which has produced a first level of a memory circuit with 0.25-micrometer dimensions.
L Geppert
exaly   +2 more sources

Lithography for semiconductor technology

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997
Abstract We present a short overview of lithography applied to semiconductor technology. It covers optical, X-rays, electrons and ions beam lithographies. The properties of resists and of the associated processes, which are the heart of this technology, are presented.
Christian NgĂ´, Charles Rosilio
openaire   +1 more source

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