Results 231 to 240 of about 11,779 (261)
Some of the next articles are maybe not open access.
Immersion lithography: New opportunities for semiconductor manufacturing
Journal of Vacuum Science & Technology B, 2004Bob Streefkerk, Nakgeuon Seong
exaly
LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing
Advances in Neural Information Processing Systems 36, 2023Su Zheng +4 more
openaire +2 more sources
Semiconductor quantum point contact fabricated by lithography with an atomic force microscope
Applied Physics Letters, 1997Thomas Heinzel, Klaus Ensslin, M Holland
exaly
Nanoscale GaAs metal–semiconductor–metal photodetectors fabricated using nanoimprint lithography
Applied Physics Letters, 1999S Y Chou, Zhaoning Yu
exaly
Nanoimprint lithography and future patterning for semiconductor devices
Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2011Tetsuro Nakasugi
exaly
Monolayer graphene-insulator-semiconductor emitter for large-area electron lithography
Applied Physics Letters, 2017Matthew P Kirley, Jeffrey T Glass
exaly
Reduction of Bubble-Induced Defect in Semiconductor Lithography Process
2023Kyoung-Whan Oh +5 more
openaire +2 more sources
APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
1991JEWELL TANYA E, RODGERS J MICHAEL
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