Results 231 to 240 of about 11,779 (261)
Some of the next articles are maybe not open access.

Immersion lithography: New opportunities for semiconductor manufacturing

Journal of Vacuum Science & Technology B, 2004
Bob Streefkerk, Nakgeuon Seong
exaly  

LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing

Advances in Neural Information Processing Systems 36, 2023
Su Zheng   +4 more
openaire   +2 more sources

Semiconductor quantum point contact fabricated by lithography with an atomic force microscope

Applied Physics Letters, 1997
Thomas Heinzel, Klaus Ensslin, M Holland
exaly  

Nanoimprint lithography and future patterning for semiconductor devices

Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2011
Tetsuro Nakasugi
exaly  

Monolayer graphene-insulator-semiconductor emitter for large-area electron lithography

Applied Physics Letters, 2017
Matthew P Kirley, Jeffrey T Glass
exaly  

Reduction of Bubble-Induced Defect in Semiconductor Lithography Process

2023
Kyoung-Whan Oh   +5 more
openaire   +2 more sources

Home - About - Disclaimer - Privacy