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Reduction of Bubble-Induced Defect in Semiconductor Lithography Process
2023Kyoung-Whan Oh +5 more
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Semiconductor lithography for the next millennium
Microelectronics Reliability, 1997openaire +1 more source
Semiconductor quantum point contact fabricated by lithography with an atomic force microscope
Applied Physics Letters, 1997Thomas Heinzel, M Holland
exaly
Characterization and removal of contaminants in lithography
Science China Physics Mechanics and AstronomyYawen Gao +4 more
semanticscholar +1 more source
Sustainable Semiconductor Manufacturing: The Role of Lithography
IEEE Transactions on Semiconductor ManufacturingEmily Gallagher +2 more
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