Results 271 to 280 of about 770,517 (280)
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Jet-printed Lithography for Semiconductor Device Fabrication
NIP & Digital Fabrication Conference, 2002W.S. Wong +4 more
openaire +1 more source
Ultrathin semiconductor layer masks for high vacuum focused Ga ion beam lithography
Applied Physics Letters, 1988exaly
Fabrication of metal–oxide–semiconductor devices with extreme ultraviolet lithography
Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1996exaly
Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1993
exaly
exaly
Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1996
exaly
exaly
Nanoimprint lithography and future patterning for semiconductor devices
Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2011exaly
E-beam exposure for semiconductor device lithography
Microelectronics Reliability, 1979openaire +1 more source

