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Lithography : Manufacturing Technologies in Semiconductor Device
Journal of the Society of Mechanical Engineers, 1986openaire +1 more source
The Potential for Economic Application of Maskless Lithography in Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing, 2010Robert C Leachman
exaly
High throughput Jet and Flash Imprint Lithography for semiconductor memory applications
SPIE Advanced Lithography, 2016Wei Zhang +11 more
semanticscholar +1 more source
Monolayer graphene-insulator-semiconductor emitter for large-area electron lithography
Applied Physics Letters, 2017Matthew P Kirley, Jeffrey T Glass
exaly
Extreme ultraviolet lithography
Nature Reviews Methods PrimersD. Kazazis +4 more
semanticscholar +1 more source
Semiconductor technology roadmaps and lithography implications
Advances in Patterning Materials and Processes XLIIKarey Holland, Steven P. Holland
openaire +1 more source
Nanoscale GaAs metal–semiconductor–metal photodetectors fabricated using nanoimprint lithography
Applied Physics Letters, 1999exaly
Lithography reticle scheduling in semiconductor manufacturing
Engineering OptimizationChia-Yen Lee
exaly
Sustainable semiconductor manufacturing with a focus on lithography
Novel Patterning Technologies 2024openaire +1 more source