Dual-comb spectroscopic ellipsometry [PDF]
Nature Communications, 2017 Spectroscopic ellipsometry is an established technique to characterize the optical properties of a material. Here, Minamikawa et al. combine the method with dual-comb spectroscopy, which allows them to obtain ellipsometric parameters including the phase ...
Takeo Minamikawa +10 more
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Spectroscopic ellipsometry for low-dimensional materials and heterostructures [PDF]
Nanophotonics, 2022 Discovery of low-dimensional materials has been of great interest in physics and material science. Optical permittivity is an optical fingerprint of material electronic structures, and thus it is an important parameter in the study of the properties of ...
Yoo SeokJae, Park Q-Han
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Metasurface array for single-shot spectroscopic ellipsometry [PDF]
Light: Science & ApplicationsSpectroscopic ellipsometry is a potent method that is widely adopted for the measurement of thin film thickness and refractive index. Most conventional ellipsometers utilize mechanically rotating polarizers and grating-based spectrometers for ...
Shun Wen +5 more
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Spectroscopic Ellipsometry of Nanocrystalline Diamond Film Growth [PDF]
ACS Omega, 2017 With the retention of many of the unrivaled properties of bulk diamond but in thin-film form, nanocrystalline diamond (NCD) has applications ranging from micro-/nano-electromechanical systems to tribological coatings. However, with Young's modulus, transparency, and thermal conductivity of films all dependent on the grain size and nondiamond content ...
Evan L. H. Thomas +7 more
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Rotating compensator spectroscopic ellipsometry based on frequency division multiplexing with retardation calibration [PDF]
Scientific ReportsSpectroscopic ellipsometry (SE) is widely used to obtain valuable information about materials such as optical constants or film thickness in a non-destructive way.
Jongkyoon Park +4 more
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In Situ Dynamic Spectroscopic Ellipsometry Characterization of Cu-Ligated Mercaptoalkanoic Acid “Molecular” Ruler Multilayers [PDF]
MicromachinesHybrid strategies that combine conventional top-down lithography with bottom-up molecular assembly are of interest for a range of applications including nanolithography and sensors.
Alexandra M. Patron +2 more
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Spectroscopic ellipsometry modelling of Cr+ implanted copper oxide thin films [PDF]
Scientific Reports, 2023 In this paper, we present modelling of spectroscopic ellipsometry data. The measured samples are thin films of copper oxides modified with the ion implantation method. The samples were prepared using reactive magnetron sputtering.
K. Ungeheuer +3 more
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Investigation of Combinatorial WO3-MoO3 Mixed Layers by Spectroscopic Ellipsometry Using Different Optical Models [PDF]
Nanomaterials, 2022 Reactive (Ar-O2 plasma) magnetron sputtered WO3-MoO3 (nanometer scaled) mixed layers were investigated and mapped by Spectroscopic Ellipsometry (SE). The W- and Mo-targets were placed separately, and 30 × 30 cm glass substrates were slowly moved under ...
Miklos Fried +5 more
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Ultra-wide-field imaging Mueller matrix spectroscopic ellipsometry for semiconductor metrology [PDF]
Nature CommunicationsWe propose an ultra-wide-field imaging Mueller matrix spectroscopic ellipsometry (IMMSE) system for semiconductor metrology. The IMMSE system achieves large-area measurements with a 20 mm × 20 mm field of view (FOV)—the largest FOV reported to date—and a
Juntaek Oh +14 more
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Polarization modulated spectroscopic ellipsometry-based surface plasmon resonance biosensor for E. coli K12 detection [PDF]
Scientific ReportsIn this work, we report on the application of the polarization modulated spectroscopic ellipsometry-based surface plasmon resonance method for sensitive detection of microorganisms in Kretschmann configuration.
Soraya Zangenehzadeh +10 more
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