Results 11 to 20 of about 26,661 (230)
Neural network-based analysis algorithm on Mueller matrix data of spectroscopic ellipsometry for the structure evaluation of nanogratings with various optical constants [PDF]
Accurate and fast characterization of nanostructures using spectroscopic ellipsometry (SE) is required in both industrial and research fields. However, conventional methods used in SE data analysis often face challenges in balancing accuracy and speed ...
Jung Juwon +6 more
doaj +2 more sources
Broadband femtosecond spectroscopic ellipsometry [PDF]
We present a setup for time-resolved spectroscopic ellipsometry in a pump–probe scheme using femtosecond laser pulses. As a probe, the system deploys supercontinuum white light pulses that are delayed with respect to single-wavelength pump pulses. A polarizer–sample–compensator–analyzer configuration allows ellipsometric measurements by scanning the ...
Steffen Richter +5 more
openaire +4 more sources
Multiple reflections in an optical retarder investigated by spectroscopic transmission ellipsometry [PDF]
The response of the ellipsometric parameters as a function of wavelength has been derived for an optical retarder. Experimental results in the wavelength region 400–1000 nm are given, these are in agreement with the derived ...
Hanekamp, L.J.
core +20 more sources
An introduction to terahertz time-domain spectroscopic ellipsometry
In the past, terahertz spectroscopy has mainly been performed based on terahertz time-domain spectroscopy systems in a transmission or a window/prism-supported reflection configuration.
X. Chen, E. Pickwell-MacPherson
doaj +1 more source
In this work, a series of amorphous carbon films were deposited on a-plane sapphire substrates by magnetron sputtering with deposition time from 15 min to 8 h, in order to investigate the thickness and optical properties in the process of growth in a non-
Ziqing Li +12 more
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Characterisation of nanodimensional structures using spectroscopic ellipsometry [PDF]
In this paper, using spectroscopic ellipsometry we studied the optical properties of thin films, nanocrystals and carbon nanotubes in UV-VIS-NIR range. With a three-phase model, we calculated the thickness of the SiO2 film on a silicon substrate.
Mirić Milka M. +4 more
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Ellipsometric analysis of isothermally devitrified metallic glasses
Effects of devitrification in metallic glasses are of particular interest for their utilization in various applications as the phase transformation from amorphous to crystalline state is known to significantly change their properties.
Ceren Uzun +4 more
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Mueller matrix spectroscopic ellipsometry
AbstractThe Mueller matrix is a mathematical description of how light is altered by an optical element or a sample under study. It describes both intensity (irradiance) and polarization changes, including a reduction of the total polarization. Mueller matrix spectroscopic ellipsometry has gained recent popularity in the optics and semiconductor ...
James N. Hilfiker +2 more
openaire +1 more source
Ion-implantation induced anomalous surface amorphization in silicon [PDF]
Spectroscopic ellipsometry (SE), high-depth-resolution Rutherford backscattering (RBS) and channeling have been used to examine the surface damage formed by room temperature N and B implantation into silicon.
Fried, M. +8 more
core +3 more sources
Fundamentals and applications of spectroscopic ellipsometry
This paper describes the use of ellipsometry as a precise and accurate technique for characterizing substrates and overlayers. A brief historical development of ellipsometry and the basic principles necessary to understand how an ellipsometer works are ...
Débora Gonçalves, Eugene A. Irene
doaj +1 more source

