Spectroscopic Ellipsometry of Nanocrystalline Diamond Film Growth
With the retention of many of the unrivaled properties of bulk diamond but in thin-film form, nanocrystalline diamond (NCD) has applications ranging from micro-/nano-electromechanical systems to tribological coatings. However, with Young's modulus, transparency, and thermal conductivity of films all dependent on the grain size and nondiamond content ...
Evan L. H. Thomas +7 more
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Ultra-wide-field imaging Mueller matrix spectroscopic ellipsometry for semiconductor metrology [PDF]
We propose an ultra-wide-field imaging Mueller matrix spectroscopic ellipsometry (IMMSE) system for semiconductor metrology. The IMMSE system achieves large-area measurements with a 20 mm × 20 mm field of view (FOV)—the largest FOV reported to date—and a
Juntaek Oh +14 more
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Polarization modulated spectroscopic ellipsometry-based surface plasmon resonance biosensor for E. coli K12 detection [PDF]
In this work, we report on the application of the polarization modulated spectroscopic ellipsometry-based surface plasmon resonance method for sensitive detection of microorganisms in Kretschmann configuration.
Soraya Zangenehzadeh +10 more
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Neural network-based analysis algorithm on Mueller matrix data of spectroscopic ellipsometry for the structure evaluation of nanogratings with various optical constants [PDF]
Accurate and fast characterization of nanostructures using spectroscopic ellipsometry (SE) is required in both industrial and research fields. However, conventional methods used in SE data analysis often face challenges in balancing accuracy and speed ...
Jung Juwon +6 more
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Broadband femtosecond spectroscopic ellipsometry [PDF]
We present a setup for time-resolved spectroscopic ellipsometry in a pump–probe scheme using femtosecond laser pulses. As a probe, the system deploys supercontinuum white light pulses that are delayed with respect to single-wavelength pump pulses. A polarizer–sample–compensator–analyzer configuration allows ellipsometric measurements by scanning the ...
Steffen Richter +5 more
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An introduction to terahertz time-domain spectroscopic ellipsometry
In the past, terahertz spectroscopy has mainly been performed based on terahertz time-domain spectroscopy systems in a transmission or a window/prism-supported reflection configuration.
X. Chen, E. Pickwell-MacPherson
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In this work, a series of amorphous carbon films were deposited on a-plane sapphire substrates by magnetron sputtering with deposition time from 15 min to 8 h, in order to investigate the thickness and optical properties in the process of growth in a non-
Ziqing Li +12 more
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Characterisation of nanodimensional structures using spectroscopic ellipsometry [PDF]
In this paper, using spectroscopic ellipsometry we studied the optical properties of thin films, nanocrystals and carbon nanotubes in UV-VIS-NIR range. With a three-phase model, we calculated the thickness of the SiO2 film on a silicon substrate.
Mirić Milka M. +4 more
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Ellipsometric analysis of isothermally devitrified metallic glasses
Effects of devitrification in metallic glasses are of particular interest for their utilization in various applications as the phase transformation from amorphous to crystalline state is known to significantly change their properties.
Ceren Uzun +4 more
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Application of Spectroscopic Ellipsometry and Mueller Ellipsometry to Optical Characterization [PDF]
This article provides a brief overview of both established and novel ellipsometry techniques, as well as their applications. Ellipsometry is an indirect optical technique, in that information about the physical properties of a sample is obtained through modeling analysis. Standard ellipsometry is typically used to characterize optically isotropic bulk
Garcia-Caurel, Enric +3 more
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