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Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry. [PDF]

open access: yesSci Rep, 2021
Kilic U   +9 more
europepmc   +1 more source

Performance of machine learning algorithms in spectroscopic ellipsometry data analysis of ZnTiO3 nanocomposite. [PDF]

open access: yesSci Rep
Barkhordari A   +5 more
europepmc   +1 more source

Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry. [PDF]

open access: yesSci Rep, 2020
Kilic U   +9 more
europepmc   +1 more source

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