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Characterizing temperature-dependent optical properties of (MA0.13FA0.87) PbI3 single crystals using spectroscopic ellipsometry. [PDF]
Sci Rep, 2019 Chen HW, Gulo DP, Chao YC, Liu HL.
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Industrial applications of spectroscopic ellipsometry
Thin Solid Films, 2004Abstract In this work we develop the concept of the ‘typical’ industrial ellipsometry user, discussing his/her needs and skills, compared to the scholarly user. Following this, we will give examples of industrial problems where spectroscopic ellipsometry (SE) was used to obtain the end result.
Harland G Tompkins
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Dynamic spectroscopic imaging ellipsometry
Optics Letters, 2022A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Δ(λ, x) dynamically at a speed of 30 Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch ...
Daesuk Kim +6 more
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Roughness measurements by spectroscopic ellipsometry
Applied Optics, 1985The surface roughnesses of fifteen well-characterized aluminum roughness standards were studied using spectroscopic ellipsometry in the spectral range from 300 to 650 nm at 70° angle of incidence. It was found that the measured ellipsometric parameters ψ and Δ qualitatively discriminated between the rms roughnesses of the specimens.
J R, Blanco, P J, McMarr, K, Vedam
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Data Analysis for Spectroscopic Ellipsometry
Thin Solid Films, 1993Abstract The modeling of spectroscopic ellipsometry data is reviewed, and is divided into three phases. The first phase involves the calculation of the Fresnel reflection coefficients for a given layer structure; it is shown that the Abeles formalism provides the most flexibility, and can be readily related to the Berreman formalism for calculations ...
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Spectroscopic ellipsometry of intentionally disordered superlattices
Microelectronics Journal, 2004Abstract We characterized the electronic properties of ordered and intentionally disordered GaAs–Al x Ga 1−x As superlattices, with and without dimer-type correlations in the disorder, by means of spectroscopic ellipsometry in the near band-edge region. The spectra have been compared to the calculate electronic structure.
Francisco Domínguez-Adame +4 more
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Study of Nematic Liquid Crystals by Spectroscopic Ellipsometry
Molecular Crystals and Liquid Crystals, 2010Abstract— The optical characterization of liquid crystals, in a wide spectral range, is becoming a very important technical task because of their expanding applications in displays, optical telecommunications and other advanced areas of science and engineering.
Tkachenko Volodymyr +2 more
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Spectroscopic ellipsometry in the infrared
Infrared Physics, 1981Abstract Infrared ellipsometry becomes simple and practicable by the combination of a photometric ellipsometer and a Fourier spectrometer. The different modes are described and the signal to noise ratio is calculated. Preliminary results for the optical constants of glass (BK7), fused quartz (SiO 2 ) and silicon are given in the range 400 −1 .
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Reliability in Modeling of Spectroscopic Ellipsometry
physica status solidi (a), 2000Spectroscopic ellipsometry (SE) [1, 2] is a powerful non-destructive technique to determine the structure of silicon-based materials such as amorphous silicon (a-Si) and hydrogenated amorphous silicon (a-Si :H). In analyzing the SE spectra, the Bruggeman effective medium approximation (EMA) [3, 4] is usually used to model a thin film as a mixture of ...
S.H. Lin, Y.C. Chan, D.P. Webb, Y.W. Lam
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