Results 191 to 200 of about 3,921 (200)

Effect of additives on the anisotropic etching of silicon by using a TMAH based solution

Electronic Materials Letters, 2015
Jung-Sik Kim
exaly  

Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH

Sensors and Actuators A: Physical, 2009
Prem Pal
exaly  

Effective improvement in the etching characteristics of Si{110} in low concentration TMAH solution

Micro and Nano Letters, 2018
Prem Pal
exaly  

Anisohopic etching with TMAH-IPA

1992
van Hal, R.E.G., Bergveld, Piet
openaire   +1 more source

The characteristic behavior of TMAH water solution for anisotropic etching on both Silicon substrate and SiO2 layer

Sensors and Actuators A: Physical, 2001
Ping-Hei Chen, Minking K Chyu
exaly  

Anisotropic etching with TMAH-IPA

1993
van Hal, R.E.G., Streekstra, Wim, Bergveld, Piet   +2 more
openaire   +2 more sources

Normally-off AlGaN/GaN-based MOS-HEMT with self-terminating TMAH wet recess etching

Solid-State Electronics, 2018
Young-Woo Jo, Jun-Hyeok Lee, Jae Hwa Seo
exaly  

Differences in etching characteristics of TMAH and KOH on preparing inverted pyramids for silicon solar cells

Applied Surface Science, 2013
exaly  

Anisotropic etching and electrochemical etch-stop properties of silicon in TMAH:IPA:pyrazine solutions

Metals and Materials International, 2001
exaly  

Aluminium passivation for TMAH based anisotropic etching for MEMS applications

Electronics Letters, 1999
exaly