利用自主研发的热壁低压化学气相沉积(HWLPCVD)系统,在5.08 cm(2英寸)4°偏轴4H-SiC衬底上生长4H-SiC同质外延膜。讨论了4H-SiC同质外延层中的两种扩展缺陷---彗星缺陷和胡萝卜缺陷,研究了这两种缺陷的起源与消除方法。研究发现采用化学机械抛光(CMP)方法可以有效去除扩展缺陷,提高外延膜的质量。另外 ...
王雷 +8 more
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Research on Diamond Nano-Grinding of 4H-SiC Crystals and Wear of Abrasives with Different Sharpness. [PDF]
Wu L +6 more
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Deuxième séance du SIC "Santé, exclusion, citoyenneté", Lille, 17 avril 2015
Le vendredi 17 avril prochain aura lieu la deuxième séance du SIC. Elle se déroulera à l'Université de Lille 3 dans la salle de séminaire de l'IRHiS de 13h15 à 17h45. Le programme est disponible ici: Programme Séminaire SIC 17 avril 2015. Cette séance se
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Integration of LASER Diodes Emitting at Eight Different Wavelengths from Blue to Infrared on a 4H-SiC-Based Optical Integration Platform. [PDF]
Wang X +9 more
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>10kV 4H-SiC n-IGBTs for elevated temperature environments
In this work we explore the appropriate design parameters which will enable the fabrication of a >10kVn-Channel IGBT. In particular, we emphasize the reduction of device blocking capabilities for high temperature environments.
Tiwari, Amit K. +6 more
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Horizontal air-cooled low-pressure hot-wall CVD (LP-HWCVD) system is developed to get high quality 4H-SiC epilayers. Homoepitaxial growth of 4H-SiC on off-oriented Si-face (0001) 4H-SiC substrates purchased from Cree is performed at a typical temperature
Ning, J (Ning, Jin) +8 more
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Dual-Stage Annealing for Enhanced Thulium Oxynitride Passivation on a 4H-SiC MOS Capacitor. [PDF]
Deng J, Chen J, Quah HJ.
europepmc +1 more source
First-Principles Study of Interfacial Properties and Fracture Behavior of (3C and 4H) SiC/Al Interfaces. [PDF]
Zhang R +8 more
europepmc +1 more source
Polarity Inversion-Driven Band Structure Modulation, Strain Engineering, and Electrical Property Analysis on GaN/4H-SiC Heterojunctions. [PDF]
Yang J +11 more
europepmc +1 more source
Femtosecond Laser Stealth Slicing of 4H-SiC Wafers with Static Aspheric Aberration Correction. [PDF]
Yang T, Wu R, Guo X, Chen T, Ming M.
europepmc +1 more source

