Micromachined microwave transmission lines by commercial CMOS fabrication
Proceedings of the 39th Midwest Symposium on Circuits and Systems, 2002Coplanar waveguides were designed and fabricated in standard CMOS with post-processing micromachining. Transmission line layouts were designed with commercial CAD tools, ICs were fabricated through a commercial CMOS foundry, and subsequently suspended by maskless top-side etching.
V. Milanovic +3 more
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Micromachined thermocouple microwave detector by commercial CMOS fabrication
IEEE Transactions on Microwave Theory and Techniques, 1998This paper reports on the design and testing of a thermocouple microwave detector fabricated through a commercial CMOS foundry with an additional maskless etching procedure. The detector measures true r.m.s. power of signals in the frequency range from 50 MHz to 20 GHz, and input power range from -30 to +10 dBm, the device has linearity better than ...
V. Milanovic, M. Gaitan, M.E. Zaghloul
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Towards a framework for designing applications onto hybrid nano/CMOS fabrics
Microelectronics Journal, 2009The design of CAD tools for nanofabrics involves new challenges not encountered with conventional design flow used for CMOS technology. In this paper, we propose to define a new framework able to help the designer to map an application on a wide range of emerging nanofabrics.
Catherine Dezan +6 more
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NWELL CMOS fabrication process for the Virginia Microelectronics Center
Proceedings of the Fourteenth Biennial University/Government/Industry Microelectronics Symposium (Cat. No.01CH37197), 2002The VMC is developing a CMOS process to help teach microelectronics students the techniques of semiconductor fabrication. It is also intended to be a vehicle for the implementation of VLSI digital and analog circuit designs at VCU. The development of the CMOS process is an on-going senior electrical engineering project.
N.R. Balderson +7 more
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Commercial CMOS fabricated integrated dynamic thermal scene simulator
International Electron Devices Meeting 1991 [Technical Digest], 2002The authors report a prototype integrated dynamic thermal scene simulator chip, consisting of a 2*2 array of integrated thermal pixels. The chips were fabricated using commercial CMOS processes. The micromachining process needed to create the thermally isolated structure is introduced as a maskless postprocessing step. The thermal pixel and the control
M. Parameswaran +4 more
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Modeling and Characterization of CMOS-Fabricated Capacitive Micromachined Ultrasound Transducers
Journal of Microelectromechanical Systems, 2011This paper describes the fabrication, characterization, and modeling of complementary metal-oxide-semiconductor (CMOS)-compatible capacitive micromachined ultrasound transducers (CMUTs). The transducers are fabricated using the interconnect and dielectric layers from a standard CMOS fabrication process.
Christopher B. Doody +4 more
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Thermoelectric power sensor for microwave applications by commercial CMOS fabrication
IEEE Electron Device Letters, 1997This work describes an implementation of a thermoelectric microwave power sensor fabricated through commercial CMOS process with additional maskless etching. The sensor combines micromachined coplanar waveguide and contact pads, a microwave termination which dissipates heat proportionally to input microwave power, and many aluminum-polysilicon ...
V. Milanovic +4 more
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An object-oriented design paradigm for standard CMOS fabrication technology
Proceedings of the 12th IEEE International Conference on Fuzzy Systems (Cat. No.03CH37442), 2003The object-oriented design methodology has been manipulated to model the standard CMOS fabrication technology. Detecting and characterizing the objects and classes within the basic object-oriented features of encapsulation, inheritance and polymorphism, as well as discussing the model framework and model characterization has been the main pursuits of ...
B. Hekmatshoar, C. Lucas
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CMOS Fabricated, Piezoelectrically Tunable Silicon Cavity Optomechanics
CLEO 2026We demonstrate a high-volume CMOS foundry fabricated, piezoelectrically actuated, slotted W1 photonic crystal cavity with optical resonance tuning of 3.87 THz using 40V bias, increasing the optomechanical coupling rate from 160 GHz/nm to 500 GHz/nm.
Johnathan T. Mack +7 more
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Ternary volatile random access memory based on heterogeneous graphene-CMOS fabric
Proceedings of the 2012 IEEE/ACM International Symposium on Nanoscale Architectures, 2012Graphene is an emerging nano-material that has garnered immense research interest due to its exotic electrical properties. It is believed to be a potential candidate for post-Si nanoelectronics due to high carrier mobility and extreme scalability.
Santosh Khasanvis +5 more
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