Nanotechnology in Silicon CMOS Fabrication
ECS Meeting Abstracts, 2008Abstract not Available.
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NWELL CMOS fabrication process for the Virginia Microelectronics Center
Proceedings of the Fourteenth Biennial University/Government/Industry Microelectronics Symposium (Cat. No.01CH37197), 2002The VMC is developing a CMOS process to help teach microelectronics students the techniques of semiconductor fabrication. It is also intended to be a vehicle for the implementation of VLSI digital and analog circuit designs at VCU. The development of the CMOS process is an on-going senior electrical engineering project.
N.R. Balderson +7 more
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Thermoelectric power sensor for microwave applications by commercial CMOS fabrication
IEEE Electron Device Letters, 1997This work describes an implementation of a thermoelectric microwave power sensor fabricated through commercial CMOS process with additional maskless etching. The sensor combines micromachined coplanar waveguide and contact pads, a microwave termination which dissipates heat proportionally to input microwave power, and many aluminum-polysilicon ...
V. Milanovic +4 more
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Modeling and Characterization of CMOS-Fabricated Capacitive Micromachined Ultrasound Transducers
Journal of Microelectromechanical Systems, 2011This paper describes the fabrication, characterization, and modeling of complementary metal-oxide-semiconductor (CMOS)-compatible capacitive micromachined ultrasound transducers (CMUTs). The transducers are fabricated using the interconnect and dielectric layers from a standard CMOS fabrication process.
Christopher B. Doody +4 more
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Commercial CMOS fabricated integrated dynamic thermal scene simulator
International Electron Devices Meeting 1991 [Technical Digest], 2002The authors report a prototype integrated dynamic thermal scene simulator chip, consisting of a 2*2 array of integrated thermal pixels. The chips were fabricated using commercial CMOS processes. The micromachining process needed to create the thermally isolated structure is introduced as a maskless postprocessing step. The thermal pixel and the control
M. Parameswaran +4 more
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Ternary volatile random access memory based on heterogeneous graphene-CMOS fabric
Proceedings of the 2012 IEEE/ACM International Symposium on Nanoscale Architectures, 2012Graphene is an emerging nano-material that has garnered immense research interest due to its exotic electrical properties. It is believed to be a potential candidate for post-Si nanoelectronics due to high carrier mobility and extreme scalability.
Santosh Khasanvis +5 more
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An object-oriented design paradigm for standard CMOS fabrication technology
Proceedings of the 12th IEEE International Conference on Fuzzy Systems (Cat. No.03CH37442), 2003The object-oriented design methodology has been manipulated to model the standard CMOS fabrication technology. Detecting and characterizing the objects and classes within the basic object-oriented features of encapsulation, inheritance and polymorphism, as well as discussing the model framework and model characterization has been the main pursuits of ...
B. Hekmatshoar, C. Lucas
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High performance CMOS fabricated on hybrid substrate with different crystal orientations
IEEE International Electron Devices Meeting 2003, 2004A novel structure and technology has been developed for high performance CMOS using hybrid silicon substrates with different crystal orientations (namely pFET on [110]-oriented surface and nFET on (100) surface) through wafer bonding and selective epitaxy.
M. Yang +22 more
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Submicrometer poly-Si CMOS fabrication with low-temperature laser doping
IEEE Electron Device Letters, 1989The laser doping process for submicrometer CMOS devices with leakage currents as low as 10/sup -12/ A/ mu m for both n-channel and p-channel devices is discussed. The I-V characteristics are comparable to those of poly-Si devices fabricated using ion implantation and high-temperature annealing processes.
H. Tomita +3 more
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Understanding clustering of defects in a sub-0.5 μm CMOS fabricator
Proceedings International Conference on Microelectronic Test Structures, 2002Over two decades of bipolar-experience has previously alerted one to the fact that the extent of defect clustering, assumed in the CMOS yield models, may not hold for defects monitored on microelectronic test structures (MTS). Tracing the defect clustering from inline CMOS MTS, we now describe a viable yield prediction model using data from the various
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