Results 111 to 120 of about 2,629 (140)
Some of the next articles are maybe not open access.
Implementation of accelerometer in CMOS-MEMS
2010 5th International Microsystems Packaging Assembly and Circuits Technology Conference, 2010A fully-differential capacitive accelerometer is designed and implemented using TSMC 0.35μm 2P4M CMOS-MEMS process. The measured sensitivity is 53 mV/g.
Tsung-Chi Kuo +2 more
openaire +1 more source
Versatile CMOS-MEMS integrated piezoelectric platform
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015We present the extension of the InvenSense fabrication platform to piezoelectric transduction. The newly proposed CMOS-MEMS Integrated Piezoelectric Platform inherits the wafer bonding advantages of its predecessor, leverages existing semiconductor infrastructure, and is applicable to a wide range of applications.
J.M. Tsai +10 more
openaire +1 more source
CMOS MEMS capacitive absolute pressure sensor
Journal of Micromechanics and Microengineering, 2013This paper presents the design, fabrication and characterization of a capacitive pressure sensor using a commercial 0.18??m CMOS (complementary metal?oxide?semiconductor) process and postprocess. The pressure sensor is capacitive and the structure is formed by an Al top electrode enclosed in a suspended SiO2?membrane, which acts as a movable electrode ...
M Narducci, L Yu-Chia, W Fang, J Tsai
openaire +1 more source
Three-axis accelerometer in CMOS MEMS
2009 4th International Microsystems, Packaging, Assembly and Circuits Technology Conference, 2009A three-axis accelerometer is designed and implemented using TSMC 0.18µm 1P6M CMOS MEMS process. A low-power low-noise chopper-stabilized amplifier is also designed to reduce the flicker noise.
null Tsung-Chi Kuo, null Jean-Fu Kiang
openaire +1 more source
2007 IEEE International Symposium on Circuits and Systems (ISCAS), 2007
This paper describes the frequency mixing operation of a micro electro mechanical system device designed and fabricated in a CMOS commercial technology (AMS 0.35mum). The theory of the MEMS is summarized and a CMOS fully integrated MEMS is characterized as a mixer.
J.L. Lopez +8 more
openaire +1 more source
This paper describes the frequency mixing operation of a micro electro mechanical system device designed and fabricated in a CMOS commercial technology (AMS 0.35mum). The theory of the MEMS is summarized and a CMOS fully integrated MEMS is characterized as a mixer.
J.L. Lopez +8 more
openaire +1 more source
Implementation of CMOS-MEMS Compound Lens
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, 2007This study demonstrates the possibility of implementing lens system via CMOS process. The ever first CMOS based optical focusing system successfully demonstrated focusing capability, with 5um by 6um focus spot size at 6 Hum, and capable of moving focal point 12um in axial direction.
Chuanwei Wang +4 more
openaire +1 more source
CMOS–MEMS integration today and tomorrow
Scripta Materialia, 2008Abstract The integration of complementary metal oxide semiconductor (CMOS) and microelectromechanical systems (MEMS) can improve the performance of the MEMS, allows for smaller packages and leads to a lower packaging and instrumentation cost. Polycrystalline silicon–germanium (poly-SiGe) has already shown its potential for integrating MEMS and CMOS ...
openaire +1 more source
Proceedings of 1997 IEEE International Symposium on Circuits and Systems. Circuits and Systems in the Information Age ISCAS '97, 2002
H. Baltes, A. Haberli
openaire +1 more source
H. Baltes, A. Haberli
openaire +1 more source
CMOS-MEMS resonators and their applications
2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC), 2013This paper reports on the recent progress of the high-Q integrated micromechanical resonator, oscillator, and filter using the “CMOS-MEMS technology” to enable monolithic integration of MEMS and IC. The paper scope covers three major parts, including (i) the fabrication technologies of the CMOS-MEMS resonators and their associated circuitry; (ii) the ...
openaire +1 more source
NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector
Sensors and Actuators B: Chemical, 2021Doris Ng, Yuan Hsing Fu, Tantan Zhang
exaly