Towards an Ultra-Sensitive Temperature Sensor for Uncooled Infrared Sensing in CMOS⁻MEMS Technology. [PDF]
Micromachines (Basel), 2019 Göktaş H.
europepmc +3 more sources
Multiphysics Optical–Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber [PDF]
SensorsInfrared (IR) thermal sensors on CMOS-SOI-MEMS platforms enable scalable, low-cost thermal imaging but require optimized optical, thermal, and mechanical performance.
Moshe Avraham, Yael Nemirovsky
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Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping [PDF]
Microsystems & NanoengineeringPiezoelectric microelectromechanical systems (MEMS) mirrors enable precise and rapid beam steering with low power consumption, making them essential components in light detection and ranging (LiDAR) and advanced optical imaging systems.
Yohan Jung, Dongseok Lee, Jongbaeg Kim
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Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout [PDF]
Microsystems & NanoengineeringTerahertz (THz) detectors using MEMS resonators have attracted great interests owing to their high sensitivity, rapid response, and room-temperature operation capability.
Ya Zhang +8 more
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Fabrication and Characterization of a CMOS-MEMS Humidity Sensor [PDF]
Sensors, 2015 This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the ...
John-Ojur Dennis +2 more
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Curvature of BEOL Cantilevers in CMOS-MEMS Processes [PDF]
, 2017 © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new ...
Juan Valle +3 more
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Design Considerations of an Analog Voltage Mode Readout Circuit for the CMOS-SOI-MEMS Gas Sensor Dubbed GMOS [PDF]
MicromachinesModern gas sensor technology is becoming an important part of our lives. Hence, there has been considerable effort over the past 25 years towards the goal of creating low-cost gas sensors by employing modern microelectronics technology to manufacture ...
Efraim-Lavi Bukshish +3 more
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Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS-MEMS Technique. [PDF]
Micromachines (Basel), 2020 Shen WC +4 more
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Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review [PDF]
Microsystems & NanoengineeringRecent advances in microelectromechanical systems (MEMS) resonators have enabled the development of compact devices capable of precise magnetic and electric field sensing.
Daeyeon Koh, Yohan Jung, Jongbaeg Kim
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Design and Applications of Integrated Transducers in Commercial CMOS Technology
Frontiers in Mechanical Engineering, 2022 Monolithic integration of Microelectromechanical Systems (MEMS) directly within CMOS technology offers enhanced functionality for integrated circuits (IC) and the potential improvement of system-level performance for MEMS devices in close proximity to ...
Udit Rawat +2 more
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