System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC [PDF]
Microsystems & NanoengineeringWe present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses mechanical, thermal, and electrical domains to facilitate the co-design of a MEMS sensor ...
Linze Hong +4 more
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Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing [PDF]
Sensors, 2020 Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing.
Rafel Perello-Roig +3 more
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Experiments on MEMS Integration in 0.25 μm CMOS Process
Sensors, 2018 In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology.
Piotr Michalik +2 more
exaly +3 more sources
Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach [PDF]
Micromachines, 2018 The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS)
Haotian Liu +3 more
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A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array [PDF]
Microsystems & NanoengineeringThis paper presents a highly sensitive CMOS-MEMS system-on-chip (SoC) for multiparameter sensing, achieved through the monolithic integration of a capacitive microcantilever array with on-chip signal processing circuitry.
Feiyun Wang +4 more
doaj +2 more sources
A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
Sensors, 2011 This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive
Hongwei Qu
exaly +3 more sources
Fabrication and characterization of CMOS-MEMS magnetic microsensors. [PDF]
Sensors (Basel), 2013 This study investigates the design and fabrication of magnetic microsensors using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The magnetic sensor is composed of springs and interdigitated electrodes, and it is actuated by the Lorentz force.
Hsieh CH, Dai CL, Yang MZ.
europepmc +5 more sources
Monolithic Low Noise and Low Zero-g Offset CMOS/MEMS Accelerometer Readout Scheme [PDF]
Micromachines, 2018 A monolithic low noise and low zero-g offset CMOS/MEMS accelerometer and readout scheme in standard 0.18 μm CMOS mixed signal UMC process is presented. The low noise chopper architecture and telescopic topology is developed to achieve low noise. The
Yu-Sian Liu, Kuei-Ann Wen
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High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer [PDF]
Micromachines, 2018 In this paper, a seesaw torsional relay monolithically integrated in a standard 0.35 μm complementary metal oxide semiconductor (CMOS) technology is presented.
Martín Riverola +3 more
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Multiphysics Optical–Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber [PDF]
SensorsInfrared (IR) thermal sensors on CMOS-SOI-MEMS platforms enable scalable, low-cost thermal imaging but require optimized optical, thermal, and mechanical performance.
Moshe Avraham, Yael Nemirovsky
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