Results 21 to 30 of about 169 (158)
Influence of wet etching in KOH on defects in silicon nanowires formed by cryogenic dry etching
Journal of Physics: Conference Series, 2020 Abstract The work is devoted to exploration of arrays of vertical aligned silicon nanowires (SiNWs) obtained by cryogenic dry etching in ICP mode with height of 4.5-5.5 μm and aspect ratio of 7. It was shown that geometry of nanowires has crucial influence on rate of wet etching in KOH since it is higher for 3D objects than for planar ...
A I Baranov +5 more
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Lumped element granular aluminum resonators with high kinetic inductances
AIP Advances, 2021 Recently, a new kind of distributed element superconducting resonators with granular aluminum (grAl) has been developed for circuit quantum electrodynamics. Given that lumped element resonators possess certain advantages over the distributed element ones,
Q. He +7 more
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Metals, 2022 Deformation-induced martensitic transformation as the basis of a hardening process is dependent, among others, on the stress state. In applications such as cryogenic cutting, where a hardened martensitic subsurface can be produced in metastable ...
Lara Vivian Fricke +5 more
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EnergiesRecent advancements in cryogenic etching, characterized by high aspect ratios and etching rates, address the growing demand for enhanced performance and reduced power consumption in electronics. To precisely maintain the temperature under high loads, the
Hye-In Jung +2 more
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Micro and Nano Engineering, 2022 Culturing human cells on the surface of a microchip brings living cells in direct contact with artificial microstructured surfaces. This work focuses on the effect of high aspect ratio nanostructures – dense nanoneedle arrays – on the mechanical response
Markus Pribyl +8 more
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Nanofabrication of SOI-Based Photonic Waveguide Resonators for Gravimetric Molecule Detection
Proceedings, 2019 A silicon photonic microresonator comprising two curved vertical grating couplers and a single suspended Si nanowaveguide (NWG) is developed to investigate the giant enhanced Brillouin scattering in subwavelength NWGs caused by photon-phonon interaction.
Tony Granz +9 more
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Terahertz nanospectroscopy of plasmon polaritons for the evaluation of doping in quantum devices
Nanophotonics, 2023 Terahertz (THz) waves are a highly sensitive probe of free carrier concentrations in semiconducting materials. However, most experiments operate in the far-field, which precludes the observation of nanoscale features that affect the material response ...
Guo Xiao +8 more
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Fluorine–Silicon Surface Reactions during Cryogenic and Near Room Temperature Etching [PDF]
The Journal of Physical Chemistry C, 2014 Cyrogenic etching of silicon is envisaged to enable better control over plasma processing in the microelectronics industry, albeit little is known about the fundamental differences compared to the ...
Tinck, Stefan +2 more
openaire +2 more sources
AIP Advances, 2016 In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiNx membranes using Deep Reactive Ion Etching (DRIE).
E. Serra +18 more
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Arrays of Sub-Terahertz Cryogenic Metamaterial
Applied Sciences, 2021 Integrated quasi-optical cryogenic terahertz receivers contain arrays of detectors, quasi-optical filters, interferometers, and other metamaterials. Matrices of quasi-optical band-pass, low-pass, and high-pass filters, Fabry–Perot grid interferometers ...
Mikhail Tarasov +4 more
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