Results 281 to 290 of about 35,175 (290)

Advanced deep reactive‐ion etching technology for hollow microneedles for transdermal blood sampling and drug delivery

IET Nanobiotechnology, 2013
Yufei Liu
exaly  

Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

Sensors and Actuators A: Physical, 1996
exaly  

Reduction of isotropic etch for silicon nanowires created by metal assisted deep reactive ion etching

International Journal of Nanotechnology, 2018
Chien Mau Dang
exaly  

Annealing Behavior of Reactive Ion Etching Induced Deep Levels

Journal of The Electrochemical Society, 1990
D. Misra, E. L. Heasell
openaire   +1 more source

In-plane silicon microneedles with open capillary microfluidic networks by deep reactive ion etching and sacrificial layer based sharpening

Sensors and Actuators A: Physical, 2019
exaly  

Deep Vertical Etching of Silicon Wafers Using a Hydrogenation-Assisted Reactive Ion Etching

Journal of Microelectromechanical Systems, 2007
exaly  

Deep Reactive Ion Etching

2015
Sami Franssila
exaly  

A method to evade silicon backside damage in deep reactive ion etching for anodically bonded glass–silicon structures

Sensors and Actuators A: Physical, 2001
exaly  

Deep reactive ion etching

2020
exaly  

Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide

2001
openaire   +1 more source