Results 141 to 149 of about 6,900 (149)

Microfluidic device based on deep reactive ion etching process and its lag effect for single cell capture and extraction

Sensors and Actuators B: Chemical, 2018
Pavel Neuzil, Jianguo Feng, Zdenka Fohlerová   +2 more
exaly  

Deep Vertical Etching of Silicon Wafers Using a Hydrogenation-Assisted Reactive Ion Etching

Journal of Microelectromechanical Systems, 2007
Shams Mohajerzadeh
exaly  

In-plane silicon microneedles with open capillary microfluidic networks by deep reactive ion etching and sacrificial layer based sharpening

Sensors and Actuators A: Physical, 2019
Chenxu Zhu
exaly  

Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

Sensors and Actuators A: Physical, 1996
exaly  

Deep reactive ion etching

2020
Franz Laermer
exaly  

Deep Reactive Ion Etching

2015
Sami Franssila, Franz Laermer
exaly  

Analysis of sidewall quality in through-wafer deep reactive-ion etching

Microelectronic Engineering, 2004
exaly  

Etching radical controlled gas chopped deep reactive ion etching

2013
OLYNICK DEIRDRE, RANGELOW IVO, CHAO WEILUN   +2 more
openaire   +1 more source

Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide

2001
openaire   +1 more source