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Ga2O3 Solar-Blind Deep-Ultraviolet Photodetectors with a Suspended Structure for High Responsivity and High-Speed Applications. [PDF]

open access: yesResearch (Wash D C)
Li X   +10 more
europepmc   +1 more source

Magnetic decoupling as a proofreading strategy for high-yield, time-efficient microscale self-assembly. [PDF]

open access: yesProc Natl Acad Sci U S A
Liang Z   +11 more
europepmc   +1 more source
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Manufacturing with DUV lithography

IBM Journal of Research and Development, 1997
Deep-UV (DUV) lithography has been developed to scale minimum feature sizes of devices on semiconductor chips to sub-half-micron dimensions. This paper reviews early manufacturing experiences at the IBM Microelectronics Division with deep ultraviolet (DUV) lithography at a 248-nm wavelength.
S. J. Holmes   +2 more
openaire   +1 more source

Planarizing AR for DUV lithography

SPIE Proceedings, 1999
A systematic approach was taken in order to improve the planarity of a DUV anti reflectant (AR) utilized for various lithographic steps, particularly those involving a patterned transparent layer. These layers can occur in both front and back end processing. Two approaches were pursued to accomplish this.
Timothy G. Adams   +5 more
openaire   +1 more source

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