Ga2O3 Solar-Blind Deep-Ultraviolet Photodetectors with a Suspended Structure for High Responsivity and High-Speed Applications. [PDF]
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Enhancing the Performance of Si/Ga<sub>2</sub>O<sub>3</sub> Heterojunction Solar-Blind Photodetectors for Underwater Applications. [PDF]
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Reliability Estimation and Failure Analysis of LEDs with Various Currents and Correlated Color Temperatures for Identical Power Ratings: A Comparative Study. [PDF]
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Magnetic decoupling as a proofreading strategy for high-yield, time-efficient microscale self-assembly. [PDF]
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Intracellular Quantification of an Antibiotic Metal Complex in Single Cells of Escherichia coli Using Cryo-X-ray Fluorescence Nanoimaging. [PDF]
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Study on the Carrier Transport Process in Deep Ultraviolet Light-Emitting Diodes with Al-Content-Varied AlGaN Composite Last Quantum Barrier. [PDF]
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Spectroscopic signatures of interfacial energy transfer in MoS<sub>2</sub>-based van der Waals heterostructures under deep-UV excitation. [PDF]
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Manufacturing with DUV lithography
IBM Journal of Research and Development, 1997Deep-UV (DUV) lithography has been developed to scale minimum feature sizes of devices on semiconductor chips to sub-half-micron dimensions. This paper reviews early manufacturing experiences at the IBM Microelectronics Division with deep ultraviolet (DUV) lithography at a 248-nm wavelength.
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Planarizing AR for DUV lithography
SPIE Proceedings, 1999A systematic approach was taken in order to improve the planarity of a DUV anti reflectant (AR) utilized for various lithographic steps, particularly those involving a patterned transparent layer. These layers can occur in both front and back end processing. Two approaches were pursued to accomplish this.
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